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Process development in machining of micro guideways

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Autorschaft

  • B. Denkena
  • H. W. Hoffmeister
  • M. Reichstein
  • S. Illenseer

Externe Organisationen

  • Technische Universität Braunschweig

Details

OriginalspracheEnglisch
Seiten (von - bis)257-260
Seitenumfang4
FachzeitschriftMicrosystem Technologies
Jahrgang10
Ausgabenummer3
PublikationsstatusVeröffentlicht - März 2004

Abstract

The increasing market of micro systems requires new flexible and economic production systems. The cutting technologies are here in addition to the already established microtechnological processes, above all for the new materials in the field of microsystems technology. The grinding studies prove that in respect to the surface qualities of micro machined hard materials, a face grinding process is much better suited than a peripheral grinding process. However, the high process forces are disadvantageous. The micro drilling processes showed that the right choice of cutting parameters make it possible to improve the quality in respect to the cutting burr height and the roughness of the drill hole wall by a factor of 10. A process of optimization turns out to be very effective.

ASJC Scopus Sachgebiete

Zitieren

Process development in machining of micro guideways. / Denkena, B.; Hoffmeister, H. W.; Reichstein, M. et al.
in: Microsystem Technologies, Jahrgang 10, Nr. 3, 03.2004, S. 257-260.

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Denkena, B, Hoffmeister, HW, Reichstein, M & Illenseer, S 2004, 'Process development in machining of micro guideways', Microsystem Technologies, Jg. 10, Nr. 3, S. 257-260. https://doi.org/10.1007/s00542-003-0359-y
Denkena, B., Hoffmeister, H. W., Reichstein, M., & Illenseer, S. (2004). Process development in machining of micro guideways. Microsystem Technologies, 10(3), 257-260. https://doi.org/10.1007/s00542-003-0359-y
Denkena B, Hoffmeister HW, Reichstein M, Illenseer S. Process development in machining of micro guideways. Microsystem Technologies. 2004 Mär;10(3):257-260. doi: 10.1007/s00542-003-0359-y
Denkena, B. ; Hoffmeister, H. W. ; Reichstein, M. et al. / Process development in machining of micro guideways. in: Microsystem Technologies. 2004 ; Jahrgang 10, Nr. 3. S. 257-260.
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