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Precision grinding of components for aerostatic micro guidance

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Autorschaft

  • H. K. Tönshoff
  • B. Denkena
  • T. Friemuth
  • M. Reichstein

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Details

OriginalspracheEnglisch
Seiten (von - bis)185-188
Seitenumfang4
FachzeitschriftPrecision Engineering
Jahrgang27
Ausgabenummer2
Frühes Online-Datum7 Jan. 2003
PublikationsstatusVeröffentlicht - Apr. 2003

Abstract

The work described in this paper deals with a micro grinding process development for components of a guiding system with active micro actors. Starting with the selection of a machine tool concept, investigations with different tool specifications as well as process kinematics and parameters are performed. Thereby the process is characterised by resulting shape accuracy and surface quality of the workpiece. By using an ultra precision machine tool and fine grained grinding wheels a shape accuracy within the submicron range and high surface qualities can be achieved.

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Precision grinding of components for aerostatic micro guidance. / Tönshoff, H. K.; Denkena, B.; Friemuth, T. et al.
in: Precision Engineering, Jahrgang 27, Nr. 2, 04.2003, S. 185-188.

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Tönshoff, HK, Denkena, B, Friemuth, T & Reichstein, M 2003, 'Precision grinding of components for aerostatic micro guidance', Precision Engineering, Jg. 27, Nr. 2, S. 185-188. https://doi.org/10.1016/S0141-6359(02)00191-5
Tönshoff, H. K., Denkena, B., Friemuth, T., & Reichstein, M. (2003). Precision grinding of components for aerostatic micro guidance. Precision Engineering, 27(2), 185-188. https://doi.org/10.1016/S0141-6359(02)00191-5
Tönshoff HK, Denkena B, Friemuth T, Reichstein M. Precision grinding of components for aerostatic micro guidance. Precision Engineering. 2003 Apr;27(2):185-188. Epub 2003 Jan 7. doi: 10.1016/S0141-6359(02)00191-5
Tönshoff, H. K. ; Denkena, B. ; Friemuth, T. et al. / Precision grinding of components for aerostatic micro guidance. in: Precision Engineering. 2003 ; Jahrgang 27, Nr. 2. S. 185-188.
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