Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | MOEMS and Miniaturized Systems XIII |
| Herausgeber (Verlag) | SPIE |
| Seitenumfang | 6 |
| ISBN (Print) | 9780819498908 |
| Publikationsstatus | Veröffentlicht - 7 März 2014 |
| Veranstaltung | MOEMS and Miniaturized Systems XIII - San Francisco, CA, USA / Vereinigte Staaten Dauer: 3 Feb. 2014 → 6 Feb. 2014 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Band | 8977 |
| ISSN (Print) | 0277-786X |
| ISSN (elektronisch) | 1996-756X |
Abstract
In this work we present a new type of optical strain sensor that can be manufactured by MEMS typical processes such as photolithography or by hot embossing. Such sensors can be of interest for a range of new applications in structural health monitoring for buildings and aircraft, process control and life science. The approach aims at high sensitivity and dynamic range for 1D and 2D sensing of mechanical strain and can also be extended to quantities such as pressure, force, and humidity. The sensor consists of an array of planar polymer-based multimode waveguides whose output light is guided through a measurement area and focused onto a second array of smaller detection waveguides by using micro-optical elements. Strain induced in the measurement area varies the distance between the two waveguide arrays, thus, changing the coupling efficiency. This, in turn, leads to a variation in output intensity or wavelength which is monitored. We performed extensive optical simulations in order to identify the optimal sensor layout with regard to either resolution or measurement range or both. Since the initial approach relies on manufacturing polymer waveguides with cross sections between 20×20 μm2 and 100×100 μm2 the simulations were carried out using raytracing models. For the readout of the sensor a simple fitting algorithm is proposed.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
MOEMS and Miniaturized Systems XIII. SPIE, 2014. 89770Y (Proceedings of SPIE - The International Society for Optical Engineering; Band 8977).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Planar integrated polymer-based optical strain sensor
AU - Kelb, Christian
AU - Reithmeier, Eduard
AU - Roth, Bernhard
PY - 2014/3/7
Y1 - 2014/3/7
N2 - In this work we present a new type of optical strain sensor that can be manufactured by MEMS typical processes such as photolithography or by hot embossing. Such sensors can be of interest for a range of new applications in structural health monitoring for buildings and aircraft, process control and life science. The approach aims at high sensitivity and dynamic range for 1D and 2D sensing of mechanical strain and can also be extended to quantities such as pressure, force, and humidity. The sensor consists of an array of planar polymer-based multimode waveguides whose output light is guided through a measurement area and focused onto a second array of smaller detection waveguides by using micro-optical elements. Strain induced in the measurement area varies the distance between the two waveguide arrays, thus, changing the coupling efficiency. This, in turn, leads to a variation in output intensity or wavelength which is monitored. We performed extensive optical simulations in order to identify the optimal sensor layout with regard to either resolution or measurement range or both. Since the initial approach relies on manufacturing polymer waveguides with cross sections between 20×20 μm2 and 100×100 μm2 the simulations were carried out using raytracing models. For the readout of the sensor a simple fitting algorithm is proposed.
AB - In this work we present a new type of optical strain sensor that can be manufactured by MEMS typical processes such as photolithography or by hot embossing. Such sensors can be of interest for a range of new applications in structural health monitoring for buildings and aircraft, process control and life science. The approach aims at high sensitivity and dynamic range for 1D and 2D sensing of mechanical strain and can also be extended to quantities such as pressure, force, and humidity. The sensor consists of an array of planar polymer-based multimode waveguides whose output light is guided through a measurement area and focused onto a second array of smaller detection waveguides by using micro-optical elements. Strain induced in the measurement area varies the distance between the two waveguide arrays, thus, changing the coupling efficiency. This, in turn, leads to a variation in output intensity or wavelength which is monitored. We performed extensive optical simulations in order to identify the optimal sensor layout with regard to either resolution or measurement range or both. Since the initial approach relies on manufacturing polymer waveguides with cross sections between 20×20 μm2 and 100×100 μm2 the simulations were carried out using raytracing models. For the readout of the sensor a simple fitting algorithm is proposed.
KW - 2D Strain Sensors
KW - Flexible Polymer Sensors
KW - Planar Optronic Systems
KW - Polymer Waveguides
UR - http://www.scopus.com/inward/record.url?scp=84900791953&partnerID=8YFLogxK
U2 - 10.1117/12.2037295
DO - 10.1117/12.2037295
M3 - Conference contribution
AN - SCOPUS:84900791953
SN - 9780819498908
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - MOEMS and Miniaturized Systems XIII
PB - SPIE
T2 - MOEMS and Miniaturized Systems XIII
Y2 - 3 February 2014 through 6 February 2014
ER -