Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies |
| Untertitel | 3 - 5 August 2003, San Diego, California, USA |
| Erscheinungsort | Bellingham |
| Herausgeber (Verlag) | SPIE |
| Seiten | 80-95 |
| Seitenumfang | 16 |
| ISBN (Print) | 0-8194-5061-8 |
| Publikationsstatus | Veröffentlicht - 4 Nov. 2003 |
| Extern publiziert | Ja |
| Veranstaltung | Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies - San Diego, CA, USA / Vereinigte Staaten Dauer: 3 Aug. 2003 → 5 Aug. 2003 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Herausgeber (Verlag) | SPIE |
| Band | 5188 |
| ISSN (Print) | 0277-786X |
Abstract
Within the research network "New Optimization Concepts for High Quality UV-Coatings" European research groups cooperated to optimize optical coatings for applications in the UV/VUV-spectral range. Besides different production processes for UV-coating systems, an extended spectrum of characterization techniques has been investigated and adapted to the special requirements in the UV/VUV-spectral range by the partners. For a detailed study of the properties and their relation to the deposition parameters of UV-coatings, joint experiments were conducted by the consortium combining the research infrastructure of the partners. In the present contribution a review will be given on selected characterization techniques which were developed or adapted to coatings for the UV-range within the network. Results for fluoride coatings will be presented and discussed in respect to the parameters of conventional and ion beam sputtering processes applied for their production. Besides the optical parameters including absorption and scattering, also the structural properties and the surface quality of single layer MgF2 and LaF3-coatings will be summarised.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
Zitieren
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- BibTex
- RIS
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies: 3 - 5 August 2003, San Diego, California, USA. Bellingham: SPIE, 2003. S. 80-95 (Proceedings of SPIE - The International Society for Optical Engineering; Band 5188).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Optimization of Optical Coatings for the UV/VUV-Range
AU - Ristau, Detlev
AU - Günster, Stefan
PY - 2003/11/4
Y1 - 2003/11/4
N2 - Within the research network "New Optimization Concepts for High Quality UV-Coatings" European research groups cooperated to optimize optical coatings for applications in the UV/VUV-spectral range. Besides different production processes for UV-coating systems, an extended spectrum of characterization techniques has been investigated and adapted to the special requirements in the UV/VUV-spectral range by the partners. For a detailed study of the properties and their relation to the deposition parameters of UV-coatings, joint experiments were conducted by the consortium combining the research infrastructure of the partners. In the present contribution a review will be given on selected characterization techniques which were developed or adapted to coatings for the UV-range within the network. Results for fluoride coatings will be presented and discussed in respect to the parameters of conventional and ion beam sputtering processes applied for their production. Besides the optical parameters including absorption and scattering, also the structural properties and the surface quality of single layer MgF2 and LaF3-coatings will be summarised.
AB - Within the research network "New Optimization Concepts for High Quality UV-Coatings" European research groups cooperated to optimize optical coatings for applications in the UV/VUV-spectral range. Besides different production processes for UV-coating systems, an extended spectrum of characterization techniques has been investigated and adapted to the special requirements in the UV/VUV-spectral range by the partners. For a detailed study of the properties and their relation to the deposition parameters of UV-coatings, joint experiments were conducted by the consortium combining the research infrastructure of the partners. In the present contribution a review will be given on selected characterization techniques which were developed or adapted to coatings for the UV-range within the network. Results for fluoride coatings will be presented and discussed in respect to the parameters of conventional and ion beam sputtering processes applied for their production. Besides the optical parameters including absorption and scattering, also the structural properties and the surface quality of single layer MgF2 and LaF3-coatings will be summarised.
KW - Absorptance
KW - Fluoride coatings
KW - Spectrometry
KW - Total scattering
KW - UV-spectral range
UR - http://www.scopus.com/inward/record.url?scp=2342622122&partnerID=8YFLogxK
U2 - 10.1117/12.507067
DO - 10.1117/12.507067
M3 - Conference contribution
AN - SCOPUS:2342622122
SN - 0-8194-5061-8
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 80
EP - 95
BT - Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
PB - SPIE
CY - Bellingham
T2 - Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
Y2 - 3 August 2003 through 5 August 2003
ER -