Optical transitions in strained Si1-yCy and Si1-x-yGexCy layers on Si(001)

Publikation: Beitrag in FachzeitschriftKonferenzaufsatz in FachzeitschriftForschungPeer-Review

Autoren

  • H. J. Osten
  • W. Kissinger
  • M. Weidner
  • M. Eichler

Externe Organisationen

  • Leibniz-Institut für innovative Mikroelektronik (IHP)
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Seiten (von - bis)199-204
Seitenumfang6
FachzeitschriftMaterials Research Society Symposium - Proceedings
Jahrgang379
PublikationsstatusVeröffentlicht - 1995
Extern publiziertJa
Veranstaltung1995 European Materials Research Society Meeting (E-MRS 1995 Spring Meeting) - San Francisco, USA / Vereinigte Staaten
Dauer: 17 Apr. 199520 Apr. 1995

Abstract

The addition of carbon atoms into Si or SiGe layers on Si opens the possibility for strain and bandstructure engineering. In this paper we will investigate the influence of carbon on the optical transitions of Si1-yCy and Si1-x-yGexCy layers grown pseudomorphically on Si(001) substrate using solid source MBE including also full strain-compensation. The layers were investigated by spectroscopic ellipsometry and electroreflectance spectroscopy for y ≤ 1.2%. From the numerical derivatives of the measured dielectric constants, we determined the critical points energies E0′, E1 and E2 as a function of the carbon content y. This shift was analyzed by measuring and fitting electroreflectance spectra at 80K and ellipsometry data at room temperature, resulting in a week and nearly linear dependence on the carbon content at all transitions. These dependencies indicate that the interpretation of optical spectra of C-containing alloys can not be performed straightforward by simple interpolating between the appropriate band structures of silicon, germanium and carbon. An analysis based on only strain-induced contributions also does not describe the experimental results correctly. For a description of the observed energy shifts for pseudomorphic Si1-x-yGexCy we have to consider at least strain-induced effects and effects due to alloying.

ASJC Scopus Sachgebiete

Zitieren

Optical transitions in strained Si1-yCy and Si1-x-yGexCy layers on Si(001). / Osten, H. J.; Kissinger, W.; Weidner, M. et al.
in: Materials Research Society Symposium - Proceedings, Jahrgang 379, 1995, S. 199-204.

Publikation: Beitrag in FachzeitschriftKonferenzaufsatz in FachzeitschriftForschungPeer-Review

Osten, HJ, Kissinger, W, Weidner, M & Eichler, M 1995, 'Optical transitions in strained Si1-yCy and Si1-x-yGexCy layers on Si(001)', Materials Research Society Symposium - Proceedings, Jg. 379, S. 199-204.
Osten, H. J., Kissinger, W., Weidner, M., & Eichler, M. (1995). Optical transitions in strained Si1-yCy and Si1-x-yGexCy layers on Si(001). Materials Research Society Symposium - Proceedings, 379, 199-204.
Osten HJ, Kissinger W, Weidner M, Eichler M. Optical transitions in strained Si1-yCy and Si1-x-yGexCy layers on Si(001). Materials Research Society Symposium - Proceedings. 1995;379:199-204.
Osten, H. J. ; Kissinger, W. ; Weidner, M. et al. / Optical transitions in strained Si1-yCy and Si1-x-yGexCy layers on Si(001). in: Materials Research Society Symposium - Proceedings. 1995 ; Jahrgang 379. S. 199-204.
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abstract = "The addition of carbon atoms into Si or SiGe layers on Si opens the possibility for strain and bandstructure engineering. In this paper we will investigate the influence of carbon on the optical transitions of Si1-yCy and Si1-x-yGexCy layers grown pseudomorphically on Si(001) substrate using solid source MBE including also full strain-compensation. The layers were investigated by spectroscopic ellipsometry and electroreflectance spectroscopy for y ≤ 1.2%. From the numerical derivatives of the measured dielectric constants, we determined the critical points energies E0′, E1 and E2 as a function of the carbon content y. This shift was analyzed by measuring and fitting electroreflectance spectra at 80K and ellipsometry data at room temperature, resulting in a week and nearly linear dependence on the carbon content at all transitions. These dependencies indicate that the interpretation of optical spectra of C-containing alloys can not be performed straightforward by simple interpolating between the appropriate band structures of silicon, germanium and carbon. An analysis based on only strain-induced contributions also does not describe the experimental results correctly. For a description of the observed energy shifts for pseudomorphic Si1-x-yGexCy we have to consider at least strain-induced effects and effects due to alloying.",
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T1 - Optical transitions in strained Si1-yCy and Si1-x-yGexCy layers on Si(001)

AU - Osten, H. J.

AU - Kissinger, W.

AU - Weidner, M.

AU - Eichler, M.

PY - 1995

Y1 - 1995

N2 - The addition of carbon atoms into Si or SiGe layers on Si opens the possibility for strain and bandstructure engineering. In this paper we will investigate the influence of carbon on the optical transitions of Si1-yCy and Si1-x-yGexCy layers grown pseudomorphically on Si(001) substrate using solid source MBE including also full strain-compensation. The layers were investigated by spectroscopic ellipsometry and electroreflectance spectroscopy for y ≤ 1.2%. From the numerical derivatives of the measured dielectric constants, we determined the critical points energies E0′, E1 and E2 as a function of the carbon content y. This shift was analyzed by measuring and fitting electroreflectance spectra at 80K and ellipsometry data at room temperature, resulting in a week and nearly linear dependence on the carbon content at all transitions. These dependencies indicate that the interpretation of optical spectra of C-containing alloys can not be performed straightforward by simple interpolating between the appropriate band structures of silicon, germanium and carbon. An analysis based on only strain-induced contributions also does not describe the experimental results correctly. For a description of the observed energy shifts for pseudomorphic Si1-x-yGexCy we have to consider at least strain-induced effects and effects due to alloying.

AB - The addition of carbon atoms into Si or SiGe layers on Si opens the possibility for strain and bandstructure engineering. In this paper we will investigate the influence of carbon on the optical transitions of Si1-yCy and Si1-x-yGexCy layers grown pseudomorphically on Si(001) substrate using solid source MBE including also full strain-compensation. The layers were investigated by spectroscopic ellipsometry and electroreflectance spectroscopy for y ≤ 1.2%. From the numerical derivatives of the measured dielectric constants, we determined the critical points energies E0′, E1 and E2 as a function of the carbon content y. This shift was analyzed by measuring and fitting electroreflectance spectra at 80K and ellipsometry data at room temperature, resulting in a week and nearly linear dependence on the carbon content at all transitions. These dependencies indicate that the interpretation of optical spectra of C-containing alloys can not be performed straightforward by simple interpolating between the appropriate band structures of silicon, germanium and carbon. An analysis based on only strain-induced contributions also does not describe the experimental results correctly. For a description of the observed energy shifts for pseudomorphic Si1-x-yGexCy we have to consider at least strain-induced effects and effects due to alloying.

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AN - SCOPUS:0029544432

VL - 379

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