Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Proceedings |
| Untertitel | IEEE 70th Electronic Components and Technology Conference, ECTC 2020 |
| Herausgeber (Verlag) | Institute of Electrical and Electronics Engineers Inc. |
| Seiten | 2191-2196 |
| Seitenumfang | 6 |
| ISBN (elektronisch) | 9781728161808 |
| ISBN (Print) | 978-1-7281-6181-5 |
| Publikationsstatus | Veröffentlicht - 2020 |
| Veranstaltung | 70th IEEE Electronic Components and Technology Conference, ECTC 2020 - Orlando, USA / Vereinigte Staaten Dauer: 3 Juni 2020 → 30 Juni 2020 |
Publikationsreihe
| Name | Proceedings - Electronic Components and Technology Conference |
|---|---|
| Band | 2020-June |
| ISSN (Print) | 0569-5503 |
Abstract
As part of the PhoenixD Cluster of Excellence funded by the German Research Foundation at the Leibniz University Hanover, the Institute of Micro Production Technology (IMPT) developed an optical polymer platform for active and passive optical components. At the IMPT injection mold, four-inch diameter wafer-like substrates are fabricated using the laser direct structurable (LDS) high performance thermoplastic materials polyether-ether-ketone (PEEK). The manufactured substrate is structured by mold inlay, which are manufactured in the clean room facilities at the IMPT. The structured substrates are fabricated by lithography and electroplating processes. Cavities down to the sub-micron range can be created. Therefore, passive optical components such as wave-guides or optical gratings will be created on the PEEK substrate. The optical waveguides can be manufactured using PECVD processes, depositing silicon nitride as waveguide-material. Polymer-based wave-guide materials such as poly (methyl methacrylate) (PMMA) can be spin coated into cavities created on the surface of the substrate. In conclusion, the highly performable PEEK-substrate offers a wide range for passive optical components. Concerning active optical components, the laser activatable substrate can provide an electrical infrastructure through laser activating and electro-less deposition technologies for e.g. laser-diodes, photocells or active filters. Additionally, thermal couplings realized by LDS-MID structures can passively manage energy intensive and thermally demanding components such as laser-diodes.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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Proceedings: IEEE 70th Electronic Components and Technology Conference, ECTC 2020. Institute of Electrical and Electronics Engineers Inc., 2020. S. 2191-2196 9159477 (Proceedings - Electronic Components and Technology Conference; Band 2020-June).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Optical Platform for Highly Precise Optical Components
AU - Bengsch, Sebastian
AU - Fischer, Eike
AU - De Wall, Sascha
AU - Schelm, Timo
AU - Arndt, Matthias
AU - Wurz, Marc Christopher
N1 - Funding Information: I. INTRODUCTION In the context of the Cluster of Excellence PhoenixD funded by the German Research Foundation at the Leibniz University Hanover, the Institute of Micro Production Technology addresses a concept of an optical components platform for highly precise active and passive components. The idea is based on the miniaturization of optical setups. In this context the IMPT Funding Information: Funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) Funding Information: ACKNOWLEDGMENT I would like to thank the Cluster of Excellence PhoenixD (Photonics, Optics, and Engineering – Innovation Across Disciplines), Hannover, Germany funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany’s Excellence Strategy within the Cluster of Excellence PhoenixD (EXC 2122, Project ID 390833453) as well as the Leibniz University Hanover and the Institute of Micro Production Technology (IMPT) for the opportunity and the equipment to develop the concept of an optical platform for highly precise optical components.
PY - 2020
Y1 - 2020
N2 - As part of the PhoenixD Cluster of Excellence funded by the German Research Foundation at the Leibniz University Hanover, the Institute of Micro Production Technology (IMPT) developed an optical polymer platform for active and passive optical components. At the IMPT injection mold, four-inch diameter wafer-like substrates are fabricated using the laser direct structurable (LDS) high performance thermoplastic materials polyether-ether-ketone (PEEK). The manufactured substrate is structured by mold inlay, which are manufactured in the clean room facilities at the IMPT. The structured substrates are fabricated by lithography and electroplating processes. Cavities down to the sub-micron range can be created. Therefore, passive optical components such as wave-guides or optical gratings will be created on the PEEK substrate. The optical waveguides can be manufactured using PECVD processes, depositing silicon nitride as waveguide-material. Polymer-based wave-guide materials such as poly (methyl methacrylate) (PMMA) can be spin coated into cavities created on the surface of the substrate. In conclusion, the highly performable PEEK-substrate offers a wide range for passive optical components. Concerning active optical components, the laser activatable substrate can provide an electrical infrastructure through laser activating and electro-less deposition technologies for e.g. laser-diodes, photocells or active filters. Additionally, thermal couplings realized by LDS-MID structures can passively manage energy intensive and thermally demanding components such as laser-diodes.
AB - As part of the PhoenixD Cluster of Excellence funded by the German Research Foundation at the Leibniz University Hanover, the Institute of Micro Production Technology (IMPT) developed an optical polymer platform for active and passive optical components. At the IMPT injection mold, four-inch diameter wafer-like substrates are fabricated using the laser direct structurable (LDS) high performance thermoplastic materials polyether-ether-ketone (PEEK). The manufactured substrate is structured by mold inlay, which are manufactured in the clean room facilities at the IMPT. The structured substrates are fabricated by lithography and electroplating processes. Cavities down to the sub-micron range can be created. Therefore, passive optical components such as wave-guides or optical gratings will be created on the PEEK substrate. The optical waveguides can be manufactured using PECVD processes, depositing silicon nitride as waveguide-material. Polymer-based wave-guide materials such as poly (methyl methacrylate) (PMMA) can be spin coated into cavities created on the surface of the substrate. In conclusion, the highly performable PEEK-substrate offers a wide range for passive optical components. Concerning active optical components, the laser activatable substrate can provide an electrical infrastructure through laser activating and electro-less deposition technologies for e.g. laser-diodes, photocells or active filters. Additionally, thermal couplings realized by LDS-MID structures can passively manage energy intensive and thermally demanding components such as laser-diodes.
KW - gratings
KW - injection molding
KW - manufacturing technology
KW - optical components
KW - PEEK
KW - polyetheretherkotone
KW - polymer substrate
KW - thermoplastic
KW - waveguides
UR - http://www.scopus.com/inward/record.url?scp=85090288229&partnerID=8YFLogxK
U2 - 10.1109/ECTC32862.2020.00341
DO - 10.1109/ECTC32862.2020.00341
M3 - Conference contribution
AN - SCOPUS:85090288229
SN - 978-1-7281-6181-5
T3 - Proceedings - Electronic Components and Technology Conference
SP - 2191
EP - 2196
BT - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 70th IEEE Electronic Components and Technology Conference, ECTC 2020
Y2 - 3 June 2020 through 30 June 2020
ER -