Optical characterization of materials deposited by different processes: The LaF3 in the UV-visible region

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Autoren

  • Salvador Bosch
  • Norbert Leinfellner
  • Etienne Quesnel
  • Angela Duparre
  • Josep Ferre-Borrull
  • Stefan Guenster
  • Detlev Ristau

Externe Organisationen

  • Universitat de Barcelona (UB)
  • Commissariat à l'énergie atomique et aux énergies alternatives (CEA)
  • Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
  • Laser Zentrum Hannover e.V. (LZH)
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Titel des SammelwerksOptical and Infrared Thin Films
Untertitel1 August 2000, San Diego, USA
ErscheinungsortBellingham
Herausgeber (Verlag)SPIE
Seiten15-22
Seitenumfang8
Auflage1
ISBN (Print)0-8194-3739-5
PublikationsstatusVeröffentlicht - 19 Okt. 2000
Extern publiziertJa

Publikationsreihe

NameProceedings of SPIE - The International Society for Optical Engineering
Herausgeber (Verlag)SPIE
Band4094
ISSN (Print)0277-786X

Abstract

The optical characterization of materials in thin film phase is a standard task in the field of coating technology. There are experimental circumstances where the accurate comparison between several deposition processes (for the same material) is important. In these cases, several sets of substrates are coated at the different deposition plants. The samples will be subsequently analyzed using, if the plants are at different locations, different spectrophotometers and finally the results of all the optical characterizations will be compared. The aim of this work is to present the results of a global procedure for the optical characterization of LaF3 in the UV-visible region, deposited at three different plants. We have used R and T spectrophotometric data and we have assumed the following model for the optical characterization: n(λ) = n0+n12, k(λ) = k0 exp(k1/λ). Our method characterizes all the samples from the same deposition process by a single set of parameters (instead of a set for each sample), using all the available measurements to determine them in a single numerical fitting, without a significant loss in the quality of the fittings. This procedure reduces the number of parameters and makes the comparison between different deposition processes more clear. By using similar results obtained for MgF2, the optical characterization of stacks (manufactured using MgF2 and LaF3) is also presented.

ASJC Scopus Sachgebiete

Zitieren

Optical characterization of materials deposited by different processes: The LaF3 in the UV-visible region. / Bosch, Salvador; Leinfellner, Norbert; Quesnel, Etienne et al.
Optical and Infrared Thin Films: 1 August 2000, San Diego, USA. 1. Aufl. Bellingham: SPIE, 2000. S. 15-22 (Proceedings of SPIE - The International Society for Optical Engineering; Band 4094).

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Bosch, S, Leinfellner, N, Quesnel, E, Duparre, A, Ferre-Borrull, J, Guenster, S & Ristau, D 2000, Optical characterization of materials deposited by different processes: The LaF3 in the UV-visible region. in Optical and Infrared Thin Films: 1 August 2000, San Diego, USA. 1 Aufl., Proceedings of SPIE - The International Society for Optical Engineering, Bd. 4094, SPIE, Bellingham, S. 15-22. https://doi.org/10.1117/12.404761
Bosch, S., Leinfellner, N., Quesnel, E., Duparre, A., Ferre-Borrull, J., Guenster, S., & Ristau, D. (2000). Optical characterization of materials deposited by different processes: The LaF3 in the UV-visible region. In Optical and Infrared Thin Films: 1 August 2000, San Diego, USA (1 Aufl., S. 15-22). (Proceedings of SPIE - The International Society for Optical Engineering; Band 4094). SPIE. https://doi.org/10.1117/12.404761
Bosch S, Leinfellner N, Quesnel E, Duparre A, Ferre-Borrull J, Guenster S et al. Optical characterization of materials deposited by different processes: The LaF3 in the UV-visible region. in Optical and Infrared Thin Films: 1 August 2000, San Diego, USA. 1 Aufl. Bellingham: SPIE. 2000. S. 15-22. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.404761
Bosch, Salvador ; Leinfellner, Norbert ; Quesnel, Etienne et al. / Optical characterization of materials deposited by different processes : The LaF3 in the UV-visible region. Optical and Infrared Thin Films: 1 August 2000, San Diego, USA. 1. Aufl. Bellingham : SPIE, 2000. S. 15-22 (Proceedings of SPIE - The International Society for Optical Engineering).
Download
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