Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Advances in Optical Thin Films IV |
| Publikationsstatus | Veröffentlicht - 3 Okt. 2011 |
| Extern publiziert | Ja |
| Veranstaltung | Advances in Optical Thin Films IV - Marseille, Frankreich Dauer: 5 Sept. 2011 → 7 Sept. 2011 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Band | 8168 |
| ISSN (Print) | 0277-786X |
Abstract
Enhanced strategies in optical broadband monitoring allow for thin film deposition under rapid production conditions with very high process stability. Recent developments in the field include simulation techniques with virtual deposition systems, to enable a pre-selection of different multilayer designs, and hybrid process control strategies which combine optical monitoring with quartz crystal monitoring. In particular, automated online error re-calculation and design reoptimization are presently in the focus of research to improve the efficiency of deposition plants. In this contribution a developed re-optimization module is presented, and the resulting increase in production yield of complicated multilayer designs is demonstrated by deposition examples. Besides automated design changes directly initiated by the re-calculation software, the presented approach also considers supervising functions that stop the deposition run when critical errors are detected.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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Advances in Optical Thin Films IV. 2011. 1 (Proceedings of SPIE - The International Society for Optical Engineering; Band 8168).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Online re-optimization as a powerful part of enhanced strategies in optical broadband monitoring
AU - Schlichting, S.
AU - Heinrich, K.
AU - Ehlers, Henrik
AU - Ristau, Detlev
PY - 2011/10/3
Y1 - 2011/10/3
N2 - Enhanced strategies in optical broadband monitoring allow for thin film deposition under rapid production conditions with very high process stability. Recent developments in the field include simulation techniques with virtual deposition systems, to enable a pre-selection of different multilayer designs, and hybrid process control strategies which combine optical monitoring with quartz crystal monitoring. In particular, automated online error re-calculation and design reoptimization are presently in the focus of research to improve the efficiency of deposition plants. In this contribution a developed re-optimization module is presented, and the resulting increase in production yield of complicated multilayer designs is demonstrated by deposition examples. Besides automated design changes directly initiated by the re-calculation software, the presented approach also considers supervising functions that stop the deposition run when critical errors are detected.
AB - Enhanced strategies in optical broadband monitoring allow for thin film deposition under rapid production conditions with very high process stability. Recent developments in the field include simulation techniques with virtual deposition systems, to enable a pre-selection of different multilayer designs, and hybrid process control strategies which combine optical monitoring with quartz crystal monitoring. In particular, automated online error re-calculation and design reoptimization are presently in the focus of research to improve the efficiency of deposition plants. In this contribution a developed re-optimization module is presented, and the resulting increase in production yield of complicated multilayer designs is demonstrated by deposition examples. Besides automated design changes directly initiated by the re-calculation software, the presented approach also considers supervising functions that stop the deposition run when critical errors are detected.
KW - Automated re-optimization
KW - BBM
KW - Computational manufacturing
KW - Optical broadband monitoring
KW - Optical thin films
KW - Re-calculation
KW - Virtual deposition
UR - http://www.scopus.com/inward/record.url?scp=80455131174&partnerID=8YFLogxK
U2 - 10.1117/12.898557
DO - 10.1117/12.898557
M3 - Conference contribution
AN - SCOPUS:80455131174
SN - 9780819487940
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advances in Optical Thin Films IV
T2 - Advances in Optical Thin Films IV
Y2 - 5 September 2011 through 7 September 2011
ER -