Online detection of ozone in ion beam sputtering

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Autoren

  • Carsten Schmitz
  • Henrik Ehlers
  • Detlev Ristau

Externe Organisationen

  • Laser Zentrum Hannover e.V. (LZH)
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Titel des SammelwerksOptical Interference Coatings
UntertitelOIC 2010
Herausgeber (Verlag)OSA - The Optical Society
ISBN (Print)9781557528919
PublikationsstatusVeröffentlicht - 2010
Extern publiziertJa
VeranstaltungOptical Interference Coatings, OIC 2010 - Tucson, AZ, USA / Vereinigte Staaten
Dauer: 6 Juni 201011 Juni 2010

Publikationsreihe

NameOptics InfoBase Conference Papers
ISSN (elektronisch)2162-2701

Abstract

The contents of oxygen species are measured in the reactive atmosphere of an ion beam sputtering process. Based on oxygen sensor concepts, a reliable early detection for absorption in TiO2 layers is studied.

ASJC Scopus Sachgebiete

Zitieren

Online detection of ozone in ion beam sputtering. / Schmitz, Carsten; Ehlers, Henrik; Ristau, Detlev.
Optical Interference Coatings: OIC 2010. OSA - The Optical Society, 2010. (Optics InfoBase Conference Papers).

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Schmitz, C, Ehlers, H & Ristau, D 2010, Online detection of ozone in ion beam sputtering. in Optical Interference Coatings: OIC 2010. Optics InfoBase Conference Papers, OSA - The Optical Society, Optical Interference Coatings, OIC 2010, Tucson, AZ, USA / Vereinigte Staaten, 6 Juni 2010. https://doi.org/10.1364/oic.2010.tud4
Schmitz, C., Ehlers, H., & Ristau, D. (2010). Online detection of ozone in ion beam sputtering. In Optical Interference Coatings: OIC 2010 (Optics InfoBase Conference Papers). OSA - The Optical Society. https://doi.org/10.1364/oic.2010.tud4
Schmitz C, Ehlers H, Ristau D. Online detection of ozone in ion beam sputtering. in Optical Interference Coatings: OIC 2010. OSA - The Optical Society. 2010. (Optics InfoBase Conference Papers). doi: 10.1364/oic.2010.tud4
Schmitz, Carsten ; Ehlers, Henrik ; Ristau, Detlev. / Online detection of ozone in ion beam sputtering. Optical Interference Coatings: OIC 2010. OSA - The Optical Society, 2010. (Optics InfoBase Conference Papers).
Download
@inproceedings{094059dbd53e4a9a8a3567197d5d9d29,
title = "Online detection of ozone in ion beam sputtering",
abstract = "The contents of oxygen species are measured in the reactive atmosphere of an ion beam sputtering process. Based on oxygen sensor concepts, a reliable early detection for absorption in TiO2 layers is studied.",
author = "Carsten Schmitz and Henrik Ehlers and Detlev Ristau",
year = "2010",
doi = "10.1364/oic.2010.tud4",
language = "English",
isbn = "9781557528919",
series = "Optics InfoBase Conference Papers",
publisher = "OSA - The Optical Society",
booktitle = "Optical Interference Coatings",
address = "United States",
note = "Optical Interference Coatings, OIC 2010 ; Conference date: 06-06-2010 Through 11-06-2010",

}

Download

TY - GEN

T1 - Online detection of ozone in ion beam sputtering

AU - Schmitz, Carsten

AU - Ehlers, Henrik

AU - Ristau, Detlev

PY - 2010

Y1 - 2010

N2 - The contents of oxygen species are measured in the reactive atmosphere of an ion beam sputtering process. Based on oxygen sensor concepts, a reliable early detection for absorption in TiO2 layers is studied.

AB - The contents of oxygen species are measured in the reactive atmosphere of an ion beam sputtering process. Based on oxygen sensor concepts, a reliable early detection for absorption in TiO2 layers is studied.

UR - http://www.scopus.com/inward/record.url?scp=85087593769&partnerID=8YFLogxK

U2 - 10.1364/oic.2010.tud4

DO - 10.1364/oic.2010.tud4

M3 - Conference contribution

AN - SCOPUS:85087593769

SN - 9781557528919

T3 - Optics InfoBase Conference Papers

BT - Optical Interference Coatings

PB - OSA - The Optical Society

T2 - Optical Interference Coatings, OIC 2010

Y2 - 6 June 2010 through 11 June 2010

ER -