Numerical study and comparisons with experimental data for transient behaviour of phase boundaries during industrial FZ process for silicon crystal growth

Publikation: Beitrag in FachzeitschriftKonferenzaufsatz in FachzeitschriftForschungPeer-Review

Autoren

  • A. Rudevics
  • A. Muiznieks
  • H. Riemann
  • A. Luedge
  • G. Ratnieks
  • W. Von Ammon

Organisationseinheiten

Externe Organisationen

  • University of Latvia
  • Leibniz-Institut für Kristallzüchtung (IKZ)
  • Siltronic AG
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Seiten (von - bis)e561-e565
FachzeitschriftJournal of crystal growth
Jahrgang275
Ausgabenummer1-2
Frühes Online-Datum18 Dez. 2004
PublikationsstatusVeröffentlicht - 15 Feb. 2005

Abstract

In our numerical transient model developed previously for the industrial FZ crystal growth process with the needle-eye technique, the meshing algorithms are essentially improved and a significant amount of numerical studies are carried out for model verification. Transient modelling for the experimental growth process with step-like time dependences of inductor current and feed rod velocity has shown that time dependencies of the crystal radius and zone height calculated numerically agree with the data from praxis. The fully transient simulation for growth process of crystal starting cone has shown that the model is capable of performing the simulation even if the crystal diameter changes very significantly. These results also testified that the new FEM and BEM mesh update algorithms described in the present paper are important to perform the correct and fast simulation of transient crystal growth processes.

ASJC Scopus Sachgebiete

Zitieren

Numerical study and comparisons with experimental data for transient behaviour of phase boundaries during industrial FZ process for silicon crystal growth. / Rudevics, A.; Muiznieks, A.; Riemann, H. et al.
in: Journal of crystal growth, Jahrgang 275, Nr. 1-2, 15.02.2005, S. e561-e565.

Publikation: Beitrag in FachzeitschriftKonferenzaufsatz in FachzeitschriftForschungPeer-Review

Rudevics A, Muiznieks A, Riemann H, Luedge A, Ratnieks G, Von Ammon W. Numerical study and comparisons with experimental data for transient behaviour of phase boundaries during industrial FZ process for silicon crystal growth. Journal of crystal growth. 2005 Feb 15;275(1-2):e561-e565. Epub 2004 Dez 18. doi: 10.1016/j.jcrysgro.2004.11.068
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AU - Rudevics, A.

AU - Muiznieks, A.

AU - Riemann, H.

AU - Luedge, A.

AU - Ratnieks, G.

AU - Von Ammon, W.

N1 - Copyright: Copyright 2008 Elsevier B.V., All rights reserved.

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N2 - In our numerical transient model developed previously for the industrial FZ crystal growth process with the needle-eye technique, the meshing algorithms are essentially improved and a significant amount of numerical studies are carried out for model verification. Transient modelling for the experimental growth process with step-like time dependences of inductor current and feed rod velocity has shown that time dependencies of the crystal radius and zone height calculated numerically agree with the data from praxis. The fully transient simulation for growth process of crystal starting cone has shown that the model is capable of performing the simulation even if the crystal diameter changes very significantly. These results also testified that the new FEM and BEM mesh update algorithms described in the present paper are important to perform the correct and fast simulation of transient crystal growth processes.

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