Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Advances in X-Ray/EUV Optics, Components, and Applications |
| Publikationsstatus | Veröffentlicht - 29 Aug. 2006 |
| Extern publiziert | Ja |
| Veranstaltung | Advances in X-Ray/EUV Optics, Components, and Applications - San Diego, CA, USA / Vereinigte Staaten Dauer: 14 Aug. 2006 → 16 Aug. 2006 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Band | 6317 |
| ISSN (Print) | 0277-786X |
Abstract
For the development of pioneering optical components for beam collimation and shaping, test set-ups are indispensable for characterizing the reflectance and transmittance over the relevant spectral range. Since radiation sources with a sufficiently high brilliance were only available at synchrotron devices up to now, the characterization of the spectral characteristics was concentrated at large-scale research institutions. In contrast to that, a strong need can be noticed for innovative small and medium companies to use compact and flexible in-house spectrophotometers accelerating product development. In the framework of the present collaboration, a novel table-top spectrophotometer for measuring the spectral characteristics of medium scale EUV-optics (up to 50mm diameter) in the spectral range from 11 to 20nm was developed. The device is based on a new polychromatic measurement principle using the direct irradiation of a compact EUV-tube for illuminating the sample and a broad-band spectrometer for detecting the probe and reference beam. The samples can be investigated under different angles of incidence and in respect to lateral dependencies. In the present paper, first results with different reflecting and transmitting EUV-optical elements demonstrate flexibility, and the achieved spectral resolution and accuracy is presented.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
Advances in X-Ray/EUV Optics, Components, and Applications. 2006. 631701 (Proceedings of SPIE - The International Society for Optical Engineering; Band 6317).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Novel compact spectrophotometer for EUV-optics characterization
AU - Starke, Kai
AU - Blaschke, Holger
AU - Jensen, Lars
AU - Nevas, S.
AU - Ristau, Detlev
AU - Lebert, Rainer
AU - Wies, Christian
AU - Bayer, Armin
AU - Barkusky, Frank
AU - Mann, Klaus
PY - 2006/8/29
Y1 - 2006/8/29
N2 - For the development of pioneering optical components for beam collimation and shaping, test set-ups are indispensable for characterizing the reflectance and transmittance over the relevant spectral range. Since radiation sources with a sufficiently high brilliance were only available at synchrotron devices up to now, the characterization of the spectral characteristics was concentrated at large-scale research institutions. In contrast to that, a strong need can be noticed for innovative small and medium companies to use compact and flexible in-house spectrophotometers accelerating product development. In the framework of the present collaboration, a novel table-top spectrophotometer for measuring the spectral characteristics of medium scale EUV-optics (up to 50mm diameter) in the spectral range from 11 to 20nm was developed. The device is based on a new polychromatic measurement principle using the direct irradiation of a compact EUV-tube for illuminating the sample and a broad-band spectrometer for detecting the probe and reference beam. The samples can be investigated under different angles of incidence and in respect to lateral dependencies. In the present paper, first results with different reflecting and transmitting EUV-optical elements demonstrate flexibility, and the achieved spectral resolution and accuracy is presented.
AB - For the development of pioneering optical components for beam collimation and shaping, test set-ups are indispensable for characterizing the reflectance and transmittance over the relevant spectral range. Since radiation sources with a sufficiently high brilliance were only available at synchrotron devices up to now, the characterization of the spectral characteristics was concentrated at large-scale research institutions. In contrast to that, a strong need can be noticed for innovative small and medium companies to use compact and flexible in-house spectrophotometers accelerating product development. In the framework of the present collaboration, a novel table-top spectrophotometer for measuring the spectral characteristics of medium scale EUV-optics (up to 50mm diameter) in the spectral range from 11 to 20nm was developed. The device is based on a new polychromatic measurement principle using the direct irradiation of a compact EUV-tube for illuminating the sample and a broad-band spectrometer for detecting the probe and reference beam. The samples can be investigated under different angles of incidence and in respect to lateral dependencies. In the present paper, first results with different reflecting and transmitting EUV-optical elements demonstrate flexibility, and the achieved spectral resolution and accuracy is presented.
KW - Compact EUV-spectrophotometer
KW - EUV-optics metrology
KW - EUV-reflectometer
UR - http://www.scopus.com/inward/record.url?scp=33750588325&partnerID=8YFLogxK
U2 - 10.1117/12.686878
DO - 10.1117/12.686878
M3 - Conference contribution
AN - SCOPUS:33750588325
SN - 0819463965
SN - 9780819463968
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advances in X-Ray/EUV Optics, Components, and Applications
T2 - Advances in X-Ray/EUV Optics, Components, and Applications
Y2 - 14 August 2006 through 16 August 2006
ER -