TY - JOUR

T1 - Multiscale evaluation of microscopic stitching with tilt compensation based on metal engineering surfaces

AU - Zou, Yibo

AU - Kästner, Markus

AU - Reithmeier, Eduard

AU - Shi, Tuo

AU - Li, Xiaofeng

N1 - Funding Information: The authors would like to thank the “ German Research Foundation ” for funding the project “Data fusion for optical microscope acquired micro-topography”. At the same time, we are grateful for the support and cooperation with the institute of measurement and automatic control in Leibniz University Hannover. Funding Information: The authors would like to thank the ?German Research Foundation ? for funding the project ?Data fusion for optical microscope acquired micro-topography?. At the same time, we are grateful for the support and cooperation with the institute of measurement and automatic control in Leibniz University Hannover.

PY - 2021/5

Y1 - 2021/5

N2 - In this paper, a topographic data stitching method is firstly introduced for compensating and optimizing the tilt errors derived from the lateral guide of the stage of a confocal laser scanning microscope. Afterwards, a novel evaluation process, including both simulated verification and experimental verification, is proposed to analyze the stitching precision and its applicability. At last, the evaluation is conducted with multiscale measured datasets, using five typical engineering surfaces with different surface textures. The results show that the developed method can compensate for the tilt uncertainty without the help of the precision apparatus and exhibits improved performance in comparison with conventional methods. In addition, the results of the comprehensive verification show the stitching precision is mainly influenced by concrete surface textures, surface roughness, acquired data resolution as well as the magnitude of tilt uncertainties.

AB - In this paper, a topographic data stitching method is firstly introduced for compensating and optimizing the tilt errors derived from the lateral guide of the stage of a confocal laser scanning microscope. Afterwards, a novel evaluation process, including both simulated verification and experimental verification, is proposed to analyze the stitching precision and its applicability. At last, the evaluation is conducted with multiscale measured datasets, using five typical engineering surfaces with different surface textures. The results show that the developed method can compensate for the tilt uncertainty without the help of the precision apparatus and exhibits improved performance in comparison with conventional methods. In addition, the results of the comprehensive verification show the stitching precision is mainly influenced by concrete surface textures, surface roughness, acquired data resolution as well as the magnitude of tilt uncertainties.

KW - Confocal laser scanning microscope

KW - Data stitching

KW - Multiscale evaluation

KW - Tilt errors

UR - http://www.scopus.com/inward/record.url?scp=85101572368&partnerID=8YFLogxK

U2 - 10.1016/j.measurement.2021.109183

DO - 10.1016/j.measurement.2021.109183

M3 - Article

AN - SCOPUS:85101572368

VL - 176

JO - Measurement: Journal of the International Measurement Confederation

JF - Measurement: Journal of the International Measurement Confederation

SN - 0263-2241

M1 - 109183

ER -