Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Optical Interference Coatings, OIC 2016 |
| Herausgeber (Verlag) | OSA - The Optical Society |
| ISBN (Print) | 9781943580132 |
| Publikationsstatus | Veröffentlicht - 2016 |
| Veranstaltung | Optical Interference Coatings, OIC 2016 - Tucson, USA / Vereinigte Staaten Dauer: 19 Juni 2016 → 24 Juni 2016 |
Publikationsreihe
| Name | Optics InfoBase Conference Papers |
|---|---|
| ISSN (elektronisch) | 2162-2701 |
Abstract
A multiple scale model named virtual coater is applied to investigate in the layer properties of growing films in dependence of PVD process conditions. Results for density, roughness, stress, and index of refraction are presented.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Ingenieurwesen (insg.)
- Werkstoffmechanik
Zitieren
- Standard
- Harvard
- Apa
- Vancouver
- BibTex
- RIS
Optical Interference Coatings, OIC 2016. OSA - The Optical Society, 2016. (Optics InfoBase Conference Papers).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Multiple scale modeling of PVD sputter processes
AU - Turowski, Marcus
AU - Jupé, M.
AU - Melzig, T.
AU - Pflug, Andreas
AU - Demircan, Ayhan
AU - Ristau, Detlev
PY - 2016
Y1 - 2016
N2 - A multiple scale model named virtual coater is applied to investigate in the layer properties of growing films in dependence of PVD process conditions. Results for density, roughness, stress, and index of refraction are presented.
AB - A multiple scale model named virtual coater is applied to investigate in the layer properties of growing films in dependence of PVD process conditions. Results for density, roughness, stress, and index of refraction are presented.
UR - http://www.scopus.com/inward/record.url?scp=85085846312&partnerID=8YFLogxK
U2 - 10.1364/oic.2016.wb.4
DO - 10.1364/oic.2016.wb.4
M3 - Conference contribution
AN - SCOPUS:85085846312
SN - 9781943580132
T3 - Optics InfoBase Conference Papers
BT - Optical Interference Coatings, OIC 2016
PB - OSA - The Optical Society
T2 - Optical Interference Coatings, OIC 2016
Y2 - 19 June 2016 through 24 June 2016
ER -