Micro and nano fabrication: Tools and processes

Publikation: Buch/Bericht/Sammelwerk/Konferenzband › Monografie › Forschung › Peer-Review

Autoren

  • Hans H. Gatzen
  • Volker Saile
  • Jürg Leuthold

Organisationseinheiten

Externe Organisationen

  • Karlsruher Institut für Technologie (KIT)
  • ETH Zürich
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Seitenumfang519
ISBN (elektronisch)9783662443958
PublikationsstatusVeröffentlicht - 1 Jan. 2015

Abstract

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

ASJC Scopus Sachgebiete

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Micro and nano fabrication: Tools and processes. / Gatzen, Hans H.; Saile, Volker; Leuthold, Jürg.
2015. 519 S.

Publikation: Buch/Bericht/Sammelwerk/Konferenzband › Monografie › Forschung › Peer-Review

Gatzen HH, Saile V, Leuthold J. Micro and nano fabrication: Tools and processes. 2015. 519 S. doi: 10.1007/978-3-662-44395-8
Gatzen, Hans H. ; Saile, Volker ; Leuthold, Jürg. / Micro and nano fabrication : Tools and processes. 2015. 519 S.
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