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METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES

Publikation: Schutzrecht/Patent › Patent

Erfinder/-innen

  • Andreas Schell (Erfinder*in)
  • Joachim Fischer (Erfinder*in)
  • Johannes Kaschke (Erfinder*in)
  • Oliver Benson (Erfinder*in)

Organisationseinheiten

Externe Organisationen

  • Humboldt-Universität zu Berlin (HU Berlin)
  • Karlsruher Institut für Technologie (KIT)

Details

OriginalspracheEnglisch
Veröffentlichungsnummer (amtliches Aktenzeichen)US2014302442
IPCG03F 7/ 20 A I
Prioritätsdatum4 Apr. 2013
PublikationsstatusVeröffentlicht - 9 Okt. 2014

Abstract

An embodiment of the present invention relates to a method of fabricating an optical device, the method comprising the steps of: depositing a photoresist layer on a carrier, said photoresist layer containing at least one optical component, determining the position of the at least one optical component inside the photoresist layer before exposing the photoresist layer to a first radiation, said first radiation being capable of transforming the photoresist layer from an unmodified state to a modified state, elaborating a device pattern based on the position of the at least one optical component, and fabricating the elaborated device pattern by locally exposing the photoresist layer to the first radiation and locally transforming the photoresist layer from the unmodified state to the modified state.

Zitieren

METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES. / Schell, Andreas (Erfinder*in); Fischer, Joachim (Erfinder*in); Kaschke, Johannes (Erfinder*in) et al.
Patent Nr.: US2014302442. Okt. 09, 2014.

Publikation: Schutzrecht/Patent › Patent

Schell, A, Fischer, J, Kaschke, J, Benson, O & Wegener, M Okt.. 09 2014, METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES, Patent Nr. US2014302442.
Schell, A., Fischer, J., Kaschke, J., Benson, O., & Wegener, M. (2014). METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES. (Patent Nr. US2014302442).
Schell A, Fischer J, Kaschke J, Benson O, Wegener M, Erfinder/-innen. METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES. US2014302442. 2014 Okt 9.
Schell, Andreas (Erfinder*in) ; Fischer, Joachim (Erfinder*in) ; Kaschke, Johannes (Erfinder*in) et al. / METHODS AND FABRICATION TOOLS FOR FABRICATING OPTICAL DEVICES. Patent Nr.: US2014302442. Okt. 09, 2014.
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