Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Modeling Aspects in Optical Metrology IV |
| Seitenumfang | 10 |
| Publikationsstatus | Veröffentlicht - 13 Mai 2013 |
| Veranstaltung | Modelling Aspects in Optical Metrology 2013 - Munich, Deutschland Dauer: 13 Mai 2013 → 14 Mai 2013 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Band | 8789 |
| ISSN (Print) | 0277-786X |
| ISSN (elektronisch) | 1996-756X |
Abstract
Image stitching is a technique used to measure large surface areas with high resolution while maintaining a large field of view. We work on improving data fusion by stitching in the field of microscopic analysis of technical surfaces for structures and roughness. Guidance errors and imaging errors such as noise cause problems for seamless image fusion of technical surfaces. The optical imaging errors of 3D Microscopes, such as confocal microscopes and white light interferometers, as well as the guidance errors of their automated positioning systems have been measured to create a software to simulate automated measurements of known surfaces with specific deviations to test new stitching algorithms. We measured and incorporated radial image distortion, interferometer reference mirror shape deviations, statistical noise, drift of the positional axis, on-axis-accuracy and repeatability of the used positioning stages and misalignment of the CCD-Chip with respect to the axes of motion. We used the resulting simulation of the measurement process to test a new image registration technique that allows for the use of correlation of images by fast fourier transform for small overlaps between single measurements.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
Modeling Aspects in Optical Metrology IV. 2013. 87890G (Proceedings of SPIE - The International Society for Optical Engineering; Band 8789).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Measurement Based Simulation of Microscope Deviations for Evaluation of Stitching Algorithms for the Extension of Fourier - based Alignment
AU - Engelke, Florian
AU - Kästner, Markus
AU - Reithmeier, Eduard
PY - 2013/5/13
Y1 - 2013/5/13
N2 - Image stitching is a technique used to measure large surface areas with high resolution while maintaining a large field of view. We work on improving data fusion by stitching in the field of microscopic analysis of technical surfaces for structures and roughness. Guidance errors and imaging errors such as noise cause problems for seamless image fusion of technical surfaces. The optical imaging errors of 3D Microscopes, such as confocal microscopes and white light interferometers, as well as the guidance errors of their automated positioning systems have been measured to create a software to simulate automated measurements of known surfaces with specific deviations to test new stitching algorithms. We measured and incorporated radial image distortion, interferometer reference mirror shape deviations, statistical noise, drift of the positional axis, on-axis-accuracy and repeatability of the used positioning stages and misalignment of the CCD-Chip with respect to the axes of motion. We used the resulting simulation of the measurement process to test a new image registration technique that allows for the use of correlation of images by fast fourier transform for small overlaps between single measurements.
AB - Image stitching is a technique used to measure large surface areas with high resolution while maintaining a large field of view. We work on improving data fusion by stitching in the field of microscopic analysis of technical surfaces for structures and roughness. Guidance errors and imaging errors such as noise cause problems for seamless image fusion of technical surfaces. The optical imaging errors of 3D Microscopes, such as confocal microscopes and white light interferometers, as well as the guidance errors of their automated positioning systems have been measured to create a software to simulate automated measurements of known surfaces with specific deviations to test new stitching algorithms. We measured and incorporated radial image distortion, interferometer reference mirror shape deviations, statistical noise, drift of the positional axis, on-axis-accuracy and repeatability of the used positioning stages and misalignment of the CCD-Chip with respect to the axes of motion. We used the resulting simulation of the measurement process to test a new image registration technique that allows for the use of correlation of images by fast fourier transform for small overlaps between single measurements.
KW - 3D microscopy
KW - Confocal microscopy
KW - Data fusion
KW - Image acquisition
KW - Image alignment
KW - Stitching
KW - White-light interferometry
UR - http://www.scopus.com/inward/record.url?scp=84880380791&partnerID=8YFLogxK
U2 - 10.1117/12.2020595
DO - 10.1117/12.2020595
M3 - Conference contribution
AN - SCOPUS:84880380791
SN - 9780819496058
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Modeling Aspects in Optical Metrology IV
T2 - Modelling Aspects in Optical Metrology 2013
Y2 - 13 May 2013 through 14 May 2013
ER -