Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 |
| Herausgeber/-innen | D. Phillips, D. Billington |
| Seiten | 245-246 |
| Seitenumfang | 2 |
| ISBN (elektronisch) | 9780995775107 |
| Publikationsstatus | Veröffentlicht - 30 Mai 2017 |
| Veranstaltung | 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 - Hannover, Deutschland Dauer: 29 Mai 2017 → 2 Juni 2017 |
Publikationsreihe
| Name | Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017 |
|---|
Abstract
Micro end milling processes are not economical, as the tools are quickly worn out and their production is too cost-intensive. For this reason a batch-capable manufacturing process has been developed, enabling a simultaneous production of several thousand of silicon carbide (SiC) micro end milling tools. The manufacturing method is a combination of photolithographic structuring of a SiC-wafer and deep reactive ion etching (DRIE). The single tool heads with a height of more than 150 μm and a diameter below 30 μm are afterwards mechanically separated from the wafer and added on a shaft. Main points of this investigation are the performance of the optimized micro end mills, the tool geometry reliability and the milling surfaces quality. A systematic investigation by confo-cal scanning microscopy and scanning electron microscopy ensure a selection and characterisation of the precision geometry of the tools and micro milled structures.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Allgemeine Materialwissenschaften
- Ingenieurwesen (insg.)
- Maschinenbau
- Physik und Astronomie (insg.)
- Instrumentierung
- Ingenieurwesen (insg.)
- Wirtschaftsingenieurwesen und Fertigungstechnik
- Umweltwissenschaften (insg.)
- Environmental engineering
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- BibTex
- RIS
Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. Hrsg. / D. Phillips; D. Billington. 2017. S. 245-246 (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Mass production for micro end mills
AU - Denkena, Berend
AU - Wurz, Marc
AU - Grove, Thilo
AU - Bouabid, Abdelhamid
AU - Asadi, Esmail
PY - 2017/5/30
Y1 - 2017/5/30
N2 - Micro end milling processes are not economical, as the tools are quickly worn out and their production is too cost-intensive. For this reason a batch-capable manufacturing process has been developed, enabling a simultaneous production of several thousand of silicon carbide (SiC) micro end milling tools. The manufacturing method is a combination of photolithographic structuring of a SiC-wafer and deep reactive ion etching (DRIE). The single tool heads with a height of more than 150 μm and a diameter below 30 μm are afterwards mechanically separated from the wafer and added on a shaft. Main points of this investigation are the performance of the optimized micro end mills, the tool geometry reliability and the milling surfaces quality. A systematic investigation by confo-cal scanning microscopy and scanning electron microscopy ensure a selection and characterisation of the precision geometry of the tools and micro milled structures.
AB - Micro end milling processes are not economical, as the tools are quickly worn out and their production is too cost-intensive. For this reason a batch-capable manufacturing process has been developed, enabling a simultaneous production of several thousand of silicon carbide (SiC) micro end milling tools. The manufacturing method is a combination of photolithographic structuring of a SiC-wafer and deep reactive ion etching (DRIE). The single tool heads with a height of more than 150 μm and a diameter below 30 μm are afterwards mechanically separated from the wafer and added on a shaft. Main points of this investigation are the performance of the optimized micro end mills, the tool geometry reliability and the milling surfaces quality. A systematic investigation by confo-cal scanning microscopy and scanning electron microscopy ensure a selection and characterisation of the precision geometry of the tools and micro milled structures.
KW - Batch process
KW - Mass production
KW - Micro end mills
KW - Silicon carbide
UR - http://www.scopus.com/inward/record.url?scp=85041335313&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85041335313
T3 - Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
SP - 245
EP - 246
BT - Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
A2 - Phillips, D.
A2 - Billington, D.
T2 - 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017
Y2 - 29 May 2017 through 2 June 2017
ER -