Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019 |
| Herausgeber (Verlag) | OSA - The Optical Society |
| Seitenumfang | 1 |
| ISBN (Print) | 9781728104690 |
| Publikationsstatus | Veröffentlicht - 2019 |
| Veranstaltung | The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019 - Munich, Deutschland Dauer: 23 Juni 2019 → 27 Juni 2019 |
Publikationsreihe
| Name | Optics InfoBase Conference Papers |
|---|---|
| Band | Part F140-CLEO_Europe 2019 |
| ISSN (elektronisch) | 2162-2701 |
Abstract
Fabrication of desired micro structures in polymers is always of keen interest for applications in illumination optics, sensors and optical interconnects. The challenge is to fabricate structures in the sub-micron range but at low cost. Among other fabrication methods as described in [1], maskless lithography tends to be cost effective and can create sub-micron structures.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Ingenieurwesen (insg.)
- Werkstoffmechanik
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The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019. OSA - The Optical Society, 2019. 2019-ce_10_6 (Optics InfoBase Conference Papers; Band Part F140-CLEO_Europe 2019).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Abstract in Konferenzband › Forschung › Peer-Review
}
TY - CHAP
T1 - Low-cost fabrication of polymer based micro-optical devices for application in illumination, sensing, and optical interconnects
AU - Khan, Muhammad Shaukat
AU - Rahlves, Maik
AU - Lachmayer, Roland
AU - Roth, Bernhard
N1 - © 2019 IEEE
PY - 2019
Y1 - 2019
N2 - Fabrication of desired micro structures in polymers is always of keen interest for applications in illumination optics, sensors and optical interconnects. The challenge is to fabricate structures in the sub-micron range but at low cost. Among other fabrication methods as described in [1], maskless lithography tends to be cost effective and can create sub-micron structures.
AB - Fabrication of desired micro structures in polymers is always of keen interest for applications in illumination optics, sensors and optical interconnects. The challenge is to fabricate structures in the sub-micron range but at low cost. Among other fabrication methods as described in [1], maskless lithography tends to be cost effective and can create sub-micron structures.
UR - http://www.scopus.com/inward/record.url?scp=85084586529&partnerID=8YFLogxK
M3 - Conference abstract
SN - 9781728104690
T3 - Optics InfoBase Conference Papers
BT - The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019
PB - OSA - The Optical Society
T2 - The European Conference on Lasers and Electro-Optics, CLEO_Europe_2019
Y2 - 23 June 2019 through 27 June 2019
ER -