Details
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 176-183 |
| Seitenumfang | 8 |
| Fachzeitschrift | Proceedings of SPIE - The International Society for Optical Engineering |
| Jahrgang | 2449 |
| Publikationsstatus | Veröffentlicht - 22 Feb. 1995 |
| Extern publiziert | Ja |
| Veranstaltung | Fiber Optic Network Components 1995 - Amsterdam, Niederlande Dauer: 20 März 1995 → 24 März 1995 |
Abstract
The alignment of laser diodes to monomode fibers has to meet extremely close tolerances for a low coupling loss. Typically < 0.5μm in lateral and vertical direction and less than two degrees in angle deviation are allowed for a coupling loss below 2 dB. Presently such close tolerances can only be met by glueing or soldering both components on separate base plates and combining them via piezoactivated alignment monitoring the output of the circuit and then glueing them using UV-hardening epoxies. Such a procedure is not very economical and not useful for mass applications. This paper presents the principle and realization of a silicon micro-optical bench for laser-fiber-coupling, which avoids the above mentioned disadvantages. The micro-optical bench is realized using well controlled plasma etching processes to transfer the guiding patterns for the laser and the fiber into the silicon substrate, keeping geometry tolerances below ± 0.5 μm in lateral and vertical direction. Mounting the laser diode by means of a selfaligned soldering process, an additional contribution to the precise alignment of the laser is further improved.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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in: Proceedings of SPIE - The International Society for Optical Engineering, Jahrgang 2449, 22.02.1995, S. 176-183.
Publikation: Beitrag in Fachzeitschrift › Konferenzaufsatz in Fachzeitschrift › Forschung › Peer-Review
}
TY - JOUR
T1 - Laser-fiber-coupling by means of a silicon micro-optical bench and a self-aligned soldering process
AU - Schmidt, J P
AU - Cordes, A.
AU - Müller, Jürgen
AU - Burkhardt, H.
PY - 1995/2/22
Y1 - 1995/2/22
N2 - The alignment of laser diodes to monomode fibers has to meet extremely close tolerances for a low coupling loss. Typically < 0.5μm in lateral and vertical direction and less than two degrees in angle deviation are allowed for a coupling loss below 2 dB. Presently such close tolerances can only be met by glueing or soldering both components on separate base plates and combining them via piezoactivated alignment monitoring the output of the circuit and then glueing them using UV-hardening epoxies. Such a procedure is not very economical and not useful for mass applications. This paper presents the principle and realization of a silicon micro-optical bench for laser-fiber-coupling, which avoids the above mentioned disadvantages. The micro-optical bench is realized using well controlled plasma etching processes to transfer the guiding patterns for the laser and the fiber into the silicon substrate, keeping geometry tolerances below ± 0.5 μm in lateral and vertical direction. Mounting the laser diode by means of a selfaligned soldering process, an additional contribution to the precise alignment of the laser is further improved.
AB - The alignment of laser diodes to monomode fibers has to meet extremely close tolerances for a low coupling loss. Typically < 0.5μm in lateral and vertical direction and less than two degrees in angle deviation are allowed for a coupling loss below 2 dB. Presently such close tolerances can only be met by glueing or soldering both components on separate base plates and combining them via piezoactivated alignment monitoring the output of the circuit and then glueing them using UV-hardening epoxies. Such a procedure is not very economical and not useful for mass applications. This paper presents the principle and realization of a silicon micro-optical bench for laser-fiber-coupling, which avoids the above mentioned disadvantages. The micro-optical bench is realized using well controlled plasma etching processes to transfer the guiding patterns for the laser and the fiber into the silicon substrate, keeping geometry tolerances below ± 0.5 μm in lateral and vertical direction. Mounting the laser diode by means of a selfaligned soldering process, an additional contribution to the precise alignment of the laser is further improved.
UR - http://www.scopus.com/inward/record.url?scp=0029213996&partnerID=8YFLogxK
U2 - 10.1117/12.201968
DO - 10.1117/12.201968
M3 - Conference article
AN - SCOPUS:0029213996
VL - 2449
SP - 176
EP - 183
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
SN - 0277-786X
T2 - Fiber Optic Network Components 1995
Y2 - 20 March 1995 through 24 March 1995
ER -