Details
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 18-29 |
| Seitenumfang | 12 |
| Fachzeitschrift | International Journal of Optomechatronics |
| Jahrgang | 13 |
| Ausgabenummer | 1 |
| Publikationsstatus | Elektronisch veröffentlicht (E-Pub) - 16 Apr. 2019 |
Abstract
Marginal changes in geometrical dimensions due to temperature changes affect the performance of optical instruments. Highly dimensionally stable materials can minimize these effects since they offer low coefficients of thermal expansion (CTE). Our dilatometer, based on heterodyne interferometry, is able to determine the CTE in 10-8 K-1 range. Here, we present the improved interferometer performance using angular measurements via differential wavefront sensing to correct for tilt-to-length coupling. The setup was tested by measuring the CTE of a single-crystal silicon at 285 K. Results are in good agreement with the reported values and show a bias of less than 1%.
ASJC Scopus Sachgebiete
- Physik und Astronomie (insg.)
- Instrumentierung
- Ingenieurwesen (insg.)
- Maschinenbau
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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in: International Journal of Optomechatronics, Jahrgang 13, Nr. 1, 16.04.2019, S. 18-29.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Laser-dilatometer calibration using a single-crystal silicon sample
AU - Hamann, Ines
AU - Sanjuan, Josep
AU - Spannagel, Ruven
AU - Gohlke, Martin
AU - Wanner, Gudrun
AU - Schuster, Sönke
AU - Guzman, Felipe
AU - Braxmaier, Claus
N1 - Funding information: For the TTL analyses in Section 3 and IfoCAD scientific development, we acknowledge support from the German Research Foundation DFG within SFB 1128 geo-Q (project A05).
PY - 2019/4/16
Y1 - 2019/4/16
N2 - Marginal changes in geometrical dimensions due to temperature changes affect the performance of optical instruments. Highly dimensionally stable materials can minimize these effects since they offer low coefficients of thermal expansion (CTE). Our dilatometer, based on heterodyne interferometry, is able to determine the CTE in 10-8 K-1 range. Here, we present the improved interferometer performance using angular measurements via differential wavefront sensing to correct for tilt-to-length coupling. The setup was tested by measuring the CTE of a single-crystal silicon at 285 K. Results are in good agreement with the reported values and show a bias of less than 1%.
AB - Marginal changes in geometrical dimensions due to temperature changes affect the performance of optical instruments. Highly dimensionally stable materials can minimize these effects since they offer low coefficients of thermal expansion (CTE). Our dilatometer, based on heterodyne interferometry, is able to determine the CTE in 10-8 K-1 range. Here, we present the improved interferometer performance using angular measurements via differential wavefront sensing to correct for tilt-to-length coupling. The setup was tested by measuring the CTE of a single-crystal silicon at 285 K. Results are in good agreement with the reported values and show a bias of less than 1%.
KW - differential wavefront sensing
KW - Dilatometry
KW - silicon
KW - simulation
UR - http://www.scopus.com/inward/record.url?scp=85064576258&partnerID=8YFLogxK
U2 - 10.1080/15599612.2019.1587117
DO - 10.1080/15599612.2019.1587117
M3 - Article
AN - SCOPUS:85064576258
VL - 13
SP - 18
EP - 29
JO - International Journal of Optomechatronics
JF - International Journal of Optomechatronics
SN - 1559-9612
IS - 1
ER -