Laser Welding for Processing of Thin Crystalline Si Wafers

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Autoren

  • Marco Ernst
  • Verena Steckenreiter
  • Sarah Kajari-Schroder
  • Rolf Brendel

Organisationseinheiten

Externe Organisationen

  • Institut für Solarenergieforschung GmbH (ISFH)
  • Australian National University
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Details

OriginalspracheEnglisch
Aufsatznummer7154402
Seiten (von - bis)1335-1339
Seitenumfang5
FachzeitschriftIEEE journal of photovoltaics
Jahrgang5
Ausgabenummer5
PublikationsstatusVeröffentlicht - 10 Juli 2015

Abstract

Thin crystalline Si films (<100 μm) are used in many applications, such as sensors, photovoltaic absorbers, and optical and particle filters. Such thin crystalline Si films are difficult to handle and break easily under standard semiconductor processing. This paper presents a laser-welding process for the mechanical connection of a thin Si film with a separate stabilizing frame that is also made of crystalline Si. We measure the tear-off stresses to be in the range of 17-50 kPa. The supported thin Si films withstand typical semiconductor processes such as plasma deposition, oxidation, and wet chemical cleaning.

ASJC Scopus Sachgebiete

Ziele für nachhaltige Entwicklung

Zitieren

Laser Welding for Processing of Thin Crystalline Si Wafers. / Ernst, Marco; Steckenreiter, Verena; Kajari-Schroder, Sarah et al.
in: IEEE journal of photovoltaics, Jahrgang 5, Nr. 5, 7154402, 10.07.2015, S. 1335-1339.

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Ernst, M, Steckenreiter, V, Kajari-Schroder, S & Brendel, R 2015, 'Laser Welding for Processing of Thin Crystalline Si Wafers', IEEE journal of photovoltaics, Jg. 5, Nr. 5, 7154402, S. 1335-1339. https://doi.org/10.1109/JPHOTOV.2015.2449652
Ernst, M., Steckenreiter, V., Kajari-Schroder, S., & Brendel, R. (2015). Laser Welding for Processing of Thin Crystalline Si Wafers. IEEE journal of photovoltaics, 5(5), 1335-1339. Artikel 7154402. https://doi.org/10.1109/JPHOTOV.2015.2449652
Ernst M, Steckenreiter V, Kajari-Schroder S, Brendel R. Laser Welding for Processing of Thin Crystalline Si Wafers. IEEE journal of photovoltaics. 2015 Jul 10;5(5):1335-1339. 7154402. doi: 10.1109/JPHOTOV.2015.2449652
Ernst, Marco ; Steckenreiter, Verena ; Kajari-Schroder, Sarah et al. / Laser Welding for Processing of Thin Crystalline Si Wafers. in: IEEE journal of photovoltaics. 2015 ; Jahrgang 5, Nr. 5. S. 1335-1339.
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