Laser damage studies on MgF2 thin films

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Autoren

  • Maria Lucia Protopapa
  • Ferdinando De Tomasi
  • Maria Rita Perrone
  • Angela Piegari
  • Enrico Masetti
  • Detlev Ristau
  • Etienne Quesnel
  • Angela Duparré

Externe Organisationen

  • Instituto Nazionale per la Fisica della Materia
  • Ente Per Le Nuove Tecnologie L'energia e l'ambiente
  • Laser Zentrum Hannover e.V. (LZH)
  • Commissariat à l'énergie atomique et aux énergies alternatives (CEA)
  • Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Seiten (von - bis)681-688
Seitenumfang8
FachzeitschriftJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Jahrgang19
Ausgabenummer2
PublikationsstatusVeröffentlicht - 12 März 2001
Extern publiziertJa

Abstract

A 248 nm KrF excimer laser was used to study the damage on MgF2 thin films deposited on fused silica and CaF2 substrates. The photoacoustic beam deflection technique was used to obtain information on the radiation-film interaction processes, which can be used to validate the damage processes revealed by scanning electron microscopy (SEM). A large intrinsic tensile stress resulted from the mismatch between the thermal expansion coefficient of a fused silica substrate and the MgF2 film.

ASJC Scopus Sachgebiete

Zitieren

Laser damage studies on MgF2 thin films. / Protopapa, Maria Lucia; De Tomasi, Ferdinando; Perrone, Maria Rita et al.
in: Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films, Jahrgang 19, Nr. 2, 12.03.2001, S. 681-688.

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Protopapa, ML, De Tomasi, F, Perrone, MR, Piegari, A, Masetti, E, Ristau, D, Quesnel, E & Duparré, A 2001, 'Laser damage studies on MgF2 thin films', Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films, Jg. 19, Nr. 2, S. 681-688. https://doi.org/10.1116/1.1347049
Protopapa, M. L., De Tomasi, F., Perrone, M. R., Piegari, A., Masetti, E., Ristau, D., Quesnel, E., & Duparré, A. (2001). Laser damage studies on MgF2 thin films. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films, 19(2), 681-688. https://doi.org/10.1116/1.1347049
Protopapa ML, De Tomasi F, Perrone MR, Piegari A, Masetti E, Ristau D et al. Laser damage studies on MgF2 thin films. Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films. 2001 Mär 12;19(2):681-688. doi: 10.1116/1.1347049
Protopapa, Maria Lucia ; De Tomasi, Ferdinando ; Perrone, Maria Rita et al. / Laser damage studies on MgF2 thin films. in: Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films. 2001 ; Jahrgang 19, Nr. 2. S. 681-688.
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