Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers

Publikation: Konferenzbeitrag › Paper › Forschung › Peer-Review

Autoren

  • Norbert Kaiser
  • Bernhard Anton
  • H. Jaenchen
  • Klaus R. Mann
  • Eric Eva
  • C. Fischer
  • Rainer Henking
  • Detlev Ristau
  • Peter Weissbrodt
  • Dirk Mademann
  • L. Raupach
  • Erich Hacker

Externe Organisationen

  • Laser-Laboratorium Göttingen e.V. (LLG)
  • Laser Zentrum Hannover e.V. (LZH)
  • JENOPTIK Laser GmbH
  • Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Seiten400-409
Seitenumfang10
PublikationsstatusVeröffentlicht - 14 Juli 1995
Extern publiziertJa
Veranstaltung1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials - Boulder, CO, USA
Dauer: 24 Okt. 1994 → 26 Okt. 1994

Konferenz

Konferenz1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials
OrtBoulder, CO, USA
Zeitraum24 Okt. 1994 → 26 Okt. 1994

Abstract

LaF 3/MgF 2-dieletric thin film combinations can be applied in optics for wavelengths down to 150 nm. Several such HR systems for a wavelength of 248 nm were investigated. In these coatings, the influence of laser conditioning on damage threshold and absorptivity was found to be remarkable. XPS- and TEM-investigations showed that the conditioning effect is related to structural and stoichiometric changes in the multilayers, especially in the near-surface-sublayers.

ASJC Scopus Sachgebiete

Zitieren

Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers. / Kaiser, Norbert; Anton, Bernhard; Jaenchen, H. et al.
1995. 400-409 Beitrag in 1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials, Boulder, CO, USA.

Publikation: Konferenzbeitrag › Paper › Forschung › Peer-Review

Kaiser, N, Anton, B, Jaenchen, H, Mann, KR, Eva, E, Fischer, C, Henking, R, Ristau, D, Weissbrodt, P, Mademann, D, Raupach, L & Hacker, E 1995, 'Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers', Beitrag in 1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials, Boulder, CO, USA, 24 Okt. 1994 - 26 Okt. 1994 S. 400-409. https://doi.org/10.1117/12.213762
Kaiser, N., Anton, B., Jaenchen, H., Mann, K. R., Eva, E., Fischer, C., Henking, R., Ristau, D., Weissbrodt, P., Mademann, D., Raupach, L., & Hacker, E. (1995). Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers. 400-409. Beitrag in 1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials, Boulder, CO, USA. https://doi.org/10.1117/12.213762
Kaiser N, Anton B, Jaenchen H, Mann KR, Eva E, Fischer C et al.. Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers. 1995. Beitrag in 1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials, Boulder, CO, USA. doi: 10.1117/12.213762
Kaiser, Norbert ; Anton, Bernhard ; Jaenchen, H. et al. / Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers. Beitrag in 1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials, Boulder, CO, USA.10 S.
Download
@conference{1c6036c5548c4f3cbd5a812d7558a91d,
title = "Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers",
abstract = "LaF 3/MgF 2-dieletric thin film combinations can be applied in optics for wavelengths down to 150 nm. Several such HR systems for a wavelength of 248 nm were investigated. In these coatings, the influence of laser conditioning on damage threshold and absorptivity was found to be remarkable. XPS- and TEM-investigations showed that the conditioning effect is related to structural and stoichiometric changes in the multilayers, especially in the near-surface-sublayers.",
author = "Norbert Kaiser and Bernhard Anton and H. Jaenchen and Mann, {Klaus R.} and Eric Eva and C. Fischer and Rainer Henking and Detlev Ristau and Peter Weissbrodt and Dirk Mademann and L. Raupach and Erich Hacker",
year = "1995",
month = jul,
day = "14",
doi = "10.1117/12.213762",
language = "English",
pages = "400--409",
note = "1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials ; Conference date: 24-10-1994 Through 26-10-1994",

}

Download

TY - CONF

T1 - Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers

AU - Kaiser, Norbert

AU - Anton, Bernhard

AU - Jaenchen, H.

AU - Mann, Klaus R.

AU - Eva, Eric

AU - Fischer, C.

AU - Henking, Rainer

AU - Ristau, Detlev

AU - Weissbrodt, Peter

AU - Mademann, Dirk

AU - Raupach, L.

AU - Hacker, Erich

PY - 1995/7/14

Y1 - 1995/7/14

N2 - LaF 3/MgF 2-dieletric thin film combinations can be applied in optics for wavelengths down to 150 nm. Several such HR systems for a wavelength of 248 nm were investigated. In these coatings, the influence of laser conditioning on damage threshold and absorptivity was found to be remarkable. XPS- and TEM-investigations showed that the conditioning effect is related to structural and stoichiometric changes in the multilayers, especially in the near-surface-sublayers.

AB - LaF 3/MgF 2-dieletric thin film combinations can be applied in optics for wavelengths down to 150 nm. Several such HR systems for a wavelength of 248 nm were investigated. In these coatings, the influence of laser conditioning on damage threshold and absorptivity was found to be remarkable. XPS- and TEM-investigations showed that the conditioning effect is related to structural and stoichiometric changes in the multilayers, especially in the near-surface-sublayers.

UR - http://www.scopus.com/inward/record.url?scp=0029490371&partnerID=8YFLogxK

U2 - 10.1117/12.213762

DO - 10.1117/12.213762

M3 - Paper

AN - SCOPUS:0029490371

SP - 400

EP - 409

T2 - 1994 26th Annual Boulder Symposium on Laser-Induced Damage in Optical Materials

Y2 - 24 October 1994 through 26 October 1994

ER -