Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Magnetic Materials, Processes, and Devices 12 |
| Herausgeber (Verlag) | Electrochemical Society, Inc. |
| Seiten | 147-156 |
| Seitenumfang | 10 |
| Auflage | 10 |
| ISBN (Print) | 9781607683582 |
| Publikationsstatus | Veröffentlicht - 2013 |
| Veranstaltung | 12th International Symposium on Magnetic Materials, Processes and Devices - PRiME 2012 - Honolulu, HI, USA / Vereinigte Staaten Dauer: 8 Okt. 2012 → 10 Okt. 2012 |
Publikationsreihe
| Name | ECS Transactions |
|---|---|
| Nummer | 10 |
| Band | 50 |
| ISSN (Print) | 1938-5862 |
| ISSN (elektronisch) | 1938-6737 |
Abstract
Soft magnetic materials are used in a multitude of applications in magnetic micro electro-mechanical systems (MEMS) such as microsensors or microactuators. The most commonly applied softmagnetic material for microsensor applications is permalloy with a composition of NiFe81/19. This paper investigates the magnetic material properties as a function of the film thickness and a subsequent temperature treatment. For this the magnetic properties are measured with a Vibrating Sample Magnetometer (VSM) and for the investigation of the crystallographic structure a diffractometer is used.
ASJC Scopus Sachgebiete
- Ingenieurwesen (insg.)
- Allgemeiner Maschinenbau
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Magnetic Materials, Processes, and Devices 12. 10. Aufl. Electrochemical Society, Inc., 2013. S. 147-156 (ECS Transactions; Band 50, Nr. 10).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Investigation of the crystallization of NiFe81/19 depending on the annealing temperature
AU - Wurz, M. C.
AU - Shaganov, A.
AU - Rissing, L.
AU - Filimonov, A.
AU - Vakhrushev, S.
PY - 2013
Y1 - 2013
N2 - Soft magnetic materials are used in a multitude of applications in magnetic micro electro-mechanical systems (MEMS) such as microsensors or microactuators. The most commonly applied softmagnetic material for microsensor applications is permalloy with a composition of NiFe81/19. This paper investigates the magnetic material properties as a function of the film thickness and a subsequent temperature treatment. For this the magnetic properties are measured with a Vibrating Sample Magnetometer (VSM) and for the investigation of the crystallographic structure a diffractometer is used.
AB - Soft magnetic materials are used in a multitude of applications in magnetic micro electro-mechanical systems (MEMS) such as microsensors or microactuators. The most commonly applied softmagnetic material for microsensor applications is permalloy with a composition of NiFe81/19. This paper investigates the magnetic material properties as a function of the film thickness and a subsequent temperature treatment. For this the magnetic properties are measured with a Vibrating Sample Magnetometer (VSM) and for the investigation of the crystallographic structure a diffractometer is used.
UR - http://www.scopus.com/inward/record.url?scp=84885782383&partnerID=8YFLogxK
U2 - 10.1149/05010.0147ecst
DO - 10.1149/05010.0147ecst
M3 - Conference contribution
AN - SCOPUS:84885782383
SN - 9781607683582
T3 - ECS Transactions
SP - 147
EP - 156
BT - Magnetic Materials, Processes, and Devices 12
PB - Electrochemical Society, Inc.
T2 - 12th International Symposium on Magnetic Materials, Processes and Devices - PRiME 2012
Y2 - 8 October 2012 through 10 October 2012
ER -