Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Laser-induced damage in optical materials: 2008 |
| Untertitel | 40th Annual Boulder Damage Symposium proceedings ; 22 - 24 September 2008, Boulder, Colorado |
| Erscheinungsort | Bellingham |
| Herausgeber (Verlag) | SPIE |
| ISBN (Print) | 978-0-8194-7366-0 |
| Publikationsstatus | Veröffentlicht - 30 Dez. 2008 |
| Extern publiziert | Ja |
| Veranstaltung | 40th Annual Boulder Damage Symposium - Laser-Induced Damage in Optical Materials: 2008 - Boulder, CO, USA / Vereinigte Staaten Dauer: 22 Sept. 2008 → 24 Sept. 2008 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Herausgeber (Verlag) | SPIE |
| Band | 7132 |
| ISSN (Print) | 0277-786X |
Abstract
In many applications of ArF-excimer lasers, a specific degradation effect is observed for the CaF2 outcoupling windows which starts assumedly at the rear surface and results in a characteristic damage morphology. In the present study, this degradation mechanism is examined in a measurement series involving a variety of window samples and irradiation sequences in an excimer laser with typical numbers of up to 2 × 108 pulses for each component. The irradiated samples were inspected by scanning spectrophotometry, TOF-SIMS, electron microscopy and other analytical techniques in order to clarify the underlying degradation mechanisms. On the basis of the experimental findings, coating strategies will be outlined to improve the lifetime of CaF2 - output couplers in 193 nm excimer lasers.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
Laser-induced damage in optical materials: 2008: 40th Annual Boulder Damage Symposium proceedings ; 22 - 24 September 2008, Boulder, Colorado. Bellingham: SPIE, 2008. 71321A (Proceedings of SPIE - The International Society for Optical Engineering; Band 7132).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Investigation in the degradation of CaF2 outcouplers in excimer lasers operating at 193 nm
AU - Blaschke, H.
AU - Beermann, Nils
AU - Ehlers, Henrik
AU - Ristau, Detlev
AU - Bischoff, Martin
AU - Gäbler, Dieter
AU - Kaiser, N.
AU - Matern, Ansgar
AU - Wulff-Molder, D.
PY - 2008/12/30
Y1 - 2008/12/30
N2 - In many applications of ArF-excimer lasers, a specific degradation effect is observed for the CaF2 outcoupling windows which starts assumedly at the rear surface and results in a characteristic damage morphology. In the present study, this degradation mechanism is examined in a measurement series involving a variety of window samples and irradiation sequences in an excimer laser with typical numbers of up to 2 × 108 pulses for each component. The irradiated samples were inspected by scanning spectrophotometry, TOF-SIMS, electron microscopy and other analytical techniques in order to clarify the underlying degradation mechanisms. On the basis of the experimental findings, coating strategies will be outlined to improve the lifetime of CaF2 - output couplers in 193 nm excimer lasers.
AB - In many applications of ArF-excimer lasers, a specific degradation effect is observed for the CaF2 outcoupling windows which starts assumedly at the rear surface and results in a characteristic damage morphology. In the present study, this degradation mechanism is examined in a measurement series involving a variety of window samples and irradiation sequences in an excimer laser with typical numbers of up to 2 × 108 pulses for each component. The irradiated samples were inspected by scanning spectrophotometry, TOF-SIMS, electron microscopy and other analytical techniques in order to clarify the underlying degradation mechanisms. On the basis of the experimental findings, coating strategies will be outlined to improve the lifetime of CaF2 - output couplers in 193 nm excimer lasers.
KW - Degradation mechanism
KW - DUV
KW - Fluoride coatings
KW - SEM
KW - ToF-SIMS
KW - VUV spectroscopy
UR - http://www.scopus.com/inward/record.url?scp=62149142782&partnerID=8YFLogxK
U2 - 10.1117/12.804428
DO - 10.1117/12.804428
M3 - Conference contribution
AN - SCOPUS:62149142782
SN - 978-0-8194-7366-0
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Laser-induced damage in optical materials: 2008
PB - SPIE
CY - Bellingham
T2 - 40th Annual Boulder Damage Symposium - Laser-Induced Damage in Optical Materials: 2008
Y2 - 22 September 2008 through 24 September 2008
ER -