Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Optical Interference Coatings |
| Untertitel | OIC 2013 |
| Herausgeber (Verlag) | OSA - The Optical Society |
| ISBN (Print) | 9781557529701 |
| Publikationsstatus | Veröffentlicht - 2013 |
| Extern publiziert | Ja |
| Veranstaltung | Optical Interference Coatings, OIC 2013 - Whistler, Kanada Dauer: 16 Juni 2013 → 21 Juni 2013 |
Publikationsreihe
| Name | Optics InfoBase Conference Papers |
|---|---|
| ISSN (elektronisch) | 2162-2701 |
Abstract
In situ optical monitoring is widely used in modern high precision optical coating deposition. In Situ control of mechanical properties has the potential to be one of the next steps to a deterministic deposition process. The versatility of an in situ stress control in an IBS coating deposition process is presented in this study.
ASJC Scopus Sachgebiete
- Physik und Astronomie (insg.)
- Instrumentierung
- Physik und Astronomie (insg.)
- Atom- und Molekularphysik sowie Optik
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Optical Interference Coatings: OIC 2013. OSA - The Optical Society, 2013. (Optics InfoBase Conference Papers).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - In-Situ control of stress in IBS deposition processes
AU - Günster, Stefan
AU - Ristau, Detlev
PY - 2013
Y1 - 2013
N2 - In situ optical monitoring is widely used in modern high precision optical coating deposition. In Situ control of mechanical properties has the potential to be one of the next steps to a deterministic deposition process. The versatility of an in situ stress control in an IBS coating deposition process is presented in this study.
AB - In situ optical monitoring is widely used in modern high precision optical coating deposition. In Situ control of mechanical properties has the potential to be one of the next steps to a deterministic deposition process. The versatility of an in situ stress control in an IBS coating deposition process is presented in this study.
UR - http://www.scopus.com/inward/record.url?scp=85085404467&partnerID=8YFLogxK
U2 - 10.1364/oic.2013.thb.2
DO - 10.1364/oic.2013.thb.2
M3 - Conference contribution
AN - SCOPUS:85085404467
SN - 9781557529701
T3 - Optics InfoBase Conference Papers
BT - Optical Interference Coatings
PB - OSA - The Optical Society
T2 - Optical Interference Coatings, OIC 2013
Y2 - 16 June 2013 through 21 June 2013
ER -