Details
Originalsprache | Englisch |
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Titel des Sammelwerks | 27th Annual Boulder Damage Symposium |
Untertitel | Laser-Induced Damage in Optical Materials: 1995 |
Erscheinungsort | Bellingham |
Herausgeber (Verlag) | SPIE |
Seiten | 499-510 |
Seitenumfang | 12 |
ISBN (Print) | 0-8194-2089-1 |
Publikationsstatus | Veröffentlicht - 27 Mai 1996 |
Extern publiziert | Ja |
Veranstaltung | 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995 - Boulder, CO, USA / Vereinigte Staaten Dauer: 30 Okt. 1995 → 30 Okt. 1995 |
Publikationsreihe
Name | Proceedings of SPIE - The International Society for Optical Engineering |
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Herausgeber (Verlag) | SPIE |
Band | 2714 |
ISSN (Print) | 0277-786X |
Abstract
KrF-laser induced damage thresholds (LIDT) of HR stacks were investigated as a function of the number of quarterwave layers. The findings were interpreted in terms of calorimetric absorption measurements and scatter defect density counts as well as an analysis of the standing wave electric field. Higher numbers of high-purity Al2O3/SiO2 layers resulted in enhanced LIDT by shielding the substrate surface increasingly well. Contrary to this, LIDT decreased with increasing numbers of e-beam evaporated LaF3/MgF2 layers. This was accompanied by elevated absorptance, defect density and conditionability at higher stack numbers.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995. Bellingham: SPIE, 1996. S. 499-510 (Proceedings of SPIE - The International Society for Optical Engineering; Band 2714).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Influence of the number of double layers on the damage threshold of Al 2O3/SiO2 and LaF3/MgF2 mirrors at 248 nm
AU - Eva, Eric
AU - Mann, Klaus R.
AU - Schallenberg, Uwe B.
AU - Kaiser, Norbert
AU - Henking, Rainer
AU - Ristau, Detlev
PY - 1996/5/27
Y1 - 1996/5/27
N2 - KrF-laser induced damage thresholds (LIDT) of HR stacks were investigated as a function of the number of quarterwave layers. The findings were interpreted in terms of calorimetric absorption measurements and scatter defect density counts as well as an analysis of the standing wave electric field. Higher numbers of high-purity Al2O3/SiO2 layers resulted in enhanced LIDT by shielding the substrate surface increasingly well. Contrary to this, LIDT decreased with increasing numbers of e-beam evaporated LaF3/MgF2 layers. This was accompanied by elevated absorptance, defect density and conditionability at higher stack numbers.
AB - KrF-laser induced damage thresholds (LIDT) of HR stacks were investigated as a function of the number of quarterwave layers. The findings were interpreted in terms of calorimetric absorption measurements and scatter defect density counts as well as an analysis of the standing wave electric field. Higher numbers of high-purity Al2O3/SiO2 layers resulted in enhanced LIDT by shielding the substrate surface increasingly well. Contrary to this, LIDT decreased with increasing numbers of e-beam evaporated LaF3/MgF2 layers. This was accompanied by elevated absorptance, defect density and conditionability at higher stack numbers.
KW - Absorption
KW - Boat evaporation
KW - Conditioning
KW - e-beam evaporation
KW - Excimer lasers
KW - Laser damage
KW - Oxide and fluoride HR-coatings
KW - Scatter defect density
KW - Stack height
KW - UV
UR - http://www.scopus.com/inward/record.url?scp=3943074821&partnerID=8YFLogxK
U2 - 10.1117/12.240365
DO - 10.1117/12.240365
M3 - Conference contribution
AN - SCOPUS:3943074821
SN - 0-8194-2089-1
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 499
EP - 510
BT - 27th Annual Boulder Damage Symposium
PB - SPIE
CY - Bellingham
T2 - 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995
Y2 - 30 October 1995 through 30 October 1995
ER -