Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Stress-Induced Phenomena in Metallization - Eleventh International Workshop on Stress-Induced Phenomena in Metallization |
| Seiten | 85-90 |
| Seitenumfang | 6 |
| Publikationsstatus | Veröffentlicht - 2010 |
| Veranstaltung | 11th International Workshop on Stress-Induced Phenomena in Metallization - Bad Schandau, Deutschland Dauer: 12 Apr. 2010 → 14 Apr. 2010 |
Publikationsreihe
| Name | AIP Conference Proceedings |
|---|---|
| Band | 1300 |
| ISSN (Print) | 0094-243X |
| ISSN (elektronisch) | 1551-7616 |
Abstract
Migration effects like electro-, thermo- and stress migration are the main failure root causes in reliability stress tests of metallization systems. To access these effects by simulation, the mass flux and mass flux divergences are calculated with a user subroutine. Four models with different via bottom geometry were investigated. The mass flux divergence will be determined using a user routine which allows the direct calculation of the divgrad(x) terms. This allows a calculation with different activation energies for electro-, thermo- and stress migration. The activation energy of pure stress migration is supposed to be much higher compared to electromigration and pure thermo migration. The investigations were compared with measurements from literature yielding to good agreement.
ASJC Scopus Sachgebiete
- Physik und Astronomie (insg.)
- Allgemeine Physik und Astronomie
Zitieren
- Standard
- Harvard
- Apa
- Vancouver
- BibTex
- RIS
Stress-Induced Phenomena in Metallization - Eleventh International Workshop on Stress-Induced Phenomena in Metallization. 2010. S. 85-90 (AIP Conference Proceedings; Band 1300).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Influence of the activation energy of the different migration effects on failure locations in metallization
AU - Weide-Zaage, Kirsten
AU - Ciptokusumo, Joharsyah
AU - Aubel, Oliver
N1 - Copyright: Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2010
Y1 - 2010
N2 - Migration effects like electro-, thermo- and stress migration are the main failure root causes in reliability stress tests of metallization systems. To access these effects by simulation, the mass flux and mass flux divergences are calculated with a user subroutine. Four models with different via bottom geometry were investigated. The mass flux divergence will be determined using a user routine which allows the direct calculation of the divgrad(x) terms. This allows a calculation with different activation energies for electro-, thermo- and stress migration. The activation energy of pure stress migration is supposed to be much higher compared to electromigration and pure thermo migration. The investigations were compared with measurements from literature yielding to good agreement.
AB - Migration effects like electro-, thermo- and stress migration are the main failure root causes in reliability stress tests of metallization systems. To access these effects by simulation, the mass flux and mass flux divergences are calculated with a user subroutine. Four models with different via bottom geometry were investigated. The mass flux divergence will be determined using a user routine which allows the direct calculation of the divgrad(x) terms. This allows a calculation with different activation energies for electro-, thermo- and stress migration. The activation energy of pure stress migration is supposed to be much higher compared to electromigration and pure thermo migration. The investigations were compared with measurements from literature yielding to good agreement.
KW - activation energy
KW - Migration effects
KW - simulation
UR - http://www.scopus.com/inward/record.url?scp=79251554967&partnerID=8YFLogxK
U2 - 10.1063/1.3527141
DO - 10.1063/1.3527141
M3 - Conference contribution
AN - SCOPUS:79251554967
SN - 9780735408555
T3 - AIP Conference Proceedings
SP - 85
EP - 90
BT - Stress-Induced Phenomena in Metallization - Eleventh International Workshop on Stress-Induced Phenomena in Metallization
T2 - 11th International Workshop on Stress-Induced Phenomena in Metallization
Y2 - 12 April 2010 through 14 April 2010
ER -