Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Laser-Induced Damage in Optical Materials: 2008 |
| Untertitel | 39th Annual Boulder Damage Symposium proceedings ; 24 - 26 September 2007, Boulder, Colorado |
| Erscheinungsort | Bellingham |
| Herausgeber (Verlag) | SPIE |
| ISBN (Print) | 978-0-8194-6877-2 |
| Publikationsstatus | Veröffentlicht - 30 Dez. 2008 |
| Extern publiziert | Ja |
| Veranstaltung | 40th Annual Boulder Damage Symposium - Laser-Induced Damage in Optical Materials: 2008 - Boulder, CO, USA / Vereinigte Staaten Dauer: 22 Sept. 2008 → 24 Sept. 2008 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Herausgeber (Verlag) | SPIE |
| Band | 7132 |
| ISSN (Print) | 0277-786X |
Abstract
With respect to laser-based applications below 200 nm, fluoride materials used as layer and substrate materials are most prominent in optical components for beam shaping, steering and focussing. High band gaps and comparatively low extinction coefficients are the outstanding parameters of these components. However, fluoride coatings are exceedingly sensitive concerning surface contamination, handling, ambient atmosphere, humidity and total energy load. A set of fluoride layer stacks from different coating plants has been investigated by spectroscopic methods measuring the optical performance, laser calorimetry detecting the absorptive losses and LIDT testing the radiation resistivity of the specimens. Another set of samples was applied to an UV treatment system in nitrogen atmosphere before testing the optical performance by the procedures listed above.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
Laser-Induced Damage in Optical Materials: 2008: 39th Annual Boulder Damage Symposium proceedings ; 24 - 26 September 2007, Boulder, Colorado. Bellingham: SPIE, 2008. 71320I (Proceedings of SPIE - The International Society for Optical Engineering; Band 7132).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Influence of pre-treatment conditions on the resistivity of fluoride multilayers
AU - Blaschke, H.
AU - Ristau, Detlev
AU - Riggers, Werner
AU - Schippel, S.
PY - 2008/12/30
Y1 - 2008/12/30
N2 - With respect to laser-based applications below 200 nm, fluoride materials used as layer and substrate materials are most prominent in optical components for beam shaping, steering and focussing. High band gaps and comparatively low extinction coefficients are the outstanding parameters of these components. However, fluoride coatings are exceedingly sensitive concerning surface contamination, handling, ambient atmosphere, humidity and total energy load. A set of fluoride layer stacks from different coating plants has been investigated by spectroscopic methods measuring the optical performance, laser calorimetry detecting the absorptive losses and LIDT testing the radiation resistivity of the specimens. Another set of samples was applied to an UV treatment system in nitrogen atmosphere before testing the optical performance by the procedures listed above.
AB - With respect to laser-based applications below 200 nm, fluoride materials used as layer and substrate materials are most prominent in optical components for beam shaping, steering and focussing. High band gaps and comparatively low extinction coefficients are the outstanding parameters of these components. However, fluoride coatings are exceedingly sensitive concerning surface contamination, handling, ambient atmosphere, humidity and total energy load. A set of fluoride layer stacks from different coating plants has been investigated by spectroscopic methods measuring the optical performance, laser calorimetry detecting the absorptive losses and LIDT testing the radiation resistivity of the specimens. Another set of samples was applied to an UV treatment system in nitrogen atmosphere before testing the optical performance by the procedures listed above.
KW - Absorption losses
KW - ArF excimer laser
KW - DUV
KW - Fluoride coatings
KW - ISO 11254-2
KW - ISO 11551
KW - LIDT
KW - Thermal evaporation
UR - http://www.scopus.com/inward/record.url?scp=62149113616&partnerID=8YFLogxK
U2 - 10.1117/12.804463
DO - 10.1117/12.804463
M3 - Conference contribution
AN - SCOPUS:62149113616
SN - 978-0-8194-6877-2
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Laser-Induced Damage in Optical Materials: 2008
PB - SPIE
CY - Bellingham
T2 - 40th Annual Boulder Damage Symposium - Laser-Induced Damage in Optical Materials: 2008
Y2 - 22 September 2008 through 24 September 2008
ER -