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Indium tin oxide combined with anti-reflective coatings with high transmittance for wavelengths

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Autorschaft

  • Erik Jansson
  • Volker Scheuer
  • Elena Jordan
  • Konstantina Kostourou
  • Tanja e. Mehlstäubler

Organisationseinheiten

Externe Organisationen

  • Physikalisch-Technische Bundesanstalt (PTB)

Details

OriginalspracheEnglisch
Seiten (von - bis)1715-1722
Seitenumfang8
FachzeitschriftApplied optics
Jahrgang64
Ausgabenummer7
PublikationsstatusVeröffentlicht - 24 Feb. 2025

Abstract

The transparent and conductive properties of indium tin oxide (ITO) thin films make them an attractive coating for optically integrated ion traps. However, the relatively low transmittance for wavelengths<400 nm, high scattering, and high production temperature limit the usability in trapped-ion-based quantum technologies. Here we present ITO coatings and a combined ITO+anti-reflective (AR) coating system optimized for an ion trap applied using ion beam sputtering (IBS). The coatings feature a high transmittance for wavelengths <400 nm and additional wavelengths up to 1000 nm, low scattering, and low production temperature <150 C. The transmission, reflection, and absorption spectra are simulated and the resistance, transmittance, and scattering at 370 nm are measured for different ITO coating thicknesses and the ITO + AR coating system. For the ITO + AR coating system a resistance of 115 ± 5/, transmittance of 80%, and scattering of 0.012 ± 0.002% at 370 nm are achieved.

Zitieren

Indium tin oxide combined with anti-reflective coatings with high transmittance for wavelengths. / Jansson, Erik; Scheuer, Volker; Jordan, Elena et al.
in: Applied optics, Jahrgang 64, Nr. 7, 24.02.2025, S. 1715-1722.

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Jansson, E, Scheuer, V, Jordan, E, Kostourou, K & Mehlstäubler, TE 2025, 'Indium tin oxide combined with anti-reflective coatings with high transmittance for wavelengths', Applied optics, Jg. 64, Nr. 7, S. 1715-1722. https://doi.org/10.1364/AO.547471
Jansson, E., Scheuer, V., Jordan, E., Kostourou, K., & Mehlstäubler, T. E. (2025). Indium tin oxide combined with anti-reflective coatings with high transmittance for wavelengths. Applied optics, 64(7), 1715-1722. https://doi.org/10.1364/AO.547471
Jansson E, Scheuer V, Jordan E, Kostourou K, Mehlstäubler TE. Indium tin oxide combined with anti-reflective coatings with high transmittance for wavelengths. Applied optics. 2025 Feb 24;64(7):1715-1722. doi: 10.1364/AO.547471
Jansson, Erik ; Scheuer, Volker ; Jordan, Elena et al. / Indium tin oxide combined with anti-reflective coatings with high transmittance for wavelengths. in: Applied optics. 2025 ; Jahrgang 64, Nr. 7. S. 1715-1722.
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AU - Jansson, Erik

AU - Scheuer, Volker

AU - Jordan, Elena

AU - Kostourou, Konstantina

AU - Mehlstäubler, Tanja e.

PY - 2025/2/24

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N2 - The transparent and conductive properties of indium tin oxide (ITO) thin films make them an attractive coating for optically integrated ion traps. However, the relatively low transmittance for wavelengths<400 nm, high scattering, and high production temperature limit the usability in trapped-ion-based quantum technologies. Here we present ITO coatings and a combined ITO+anti-reflective (AR) coating system optimized for an ion trap applied using ion beam sputtering (IBS). The coatings feature a high transmittance for wavelengths <400 nm and additional wavelengths up to 1000 nm, low scattering, and low production temperature <150 ◦C. The transmission, reflection, and absorption spectra are simulated and the resistance, transmittance, and scattering at 370 nm are measured for different ITO coating thicknesses and the ITO + AR coating system. For the ITO + AR coating system a resistance of 115 ± 5/, transmittance of 80%, and scattering of 0.012 ± 0.002% at 370 nm are achieved.

AB - The transparent and conductive properties of indium tin oxide (ITO) thin films make them an attractive coating for optically integrated ion traps. However, the relatively low transmittance for wavelengths<400 nm, high scattering, and high production temperature limit the usability in trapped-ion-based quantum technologies. Here we present ITO coatings and a combined ITO+anti-reflective (AR) coating system optimized for an ion trap applied using ion beam sputtering (IBS). The coatings feature a high transmittance for wavelengths <400 nm and additional wavelengths up to 1000 nm, low scattering, and low production temperature <150 ◦C. The transmission, reflection, and absorption spectra are simulated and the resistance, transmittance, and scattering at 370 nm are measured for different ITO coating thicknesses and the ITO + AR coating system. For the ITO + AR coating system a resistance of 115 ± 5/, transmittance of 80%, and scattering of 0.012 ± 0.002% at 370 nm are achieved.

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