TY - GEN

T1 - Improved LIDT values for dielectric dispersive compensating mirrors applying ternary composites

AU - Willemsen, Thomas

AU - Schlichting, S.

AU - Gyamfi, M.

AU - Jupé, M.

AU - Ehlers, H.

AU - Morgner, Uwe

AU - Ristau, Detlev

PY - 2016/12/6

Y1 - 2016/12/6

N2 - The present contribution is addressed to an improved method to fabricate dielectric dispersive compensating mirrors (CMs) with an increased laser induced damage threshold (LIDT) by the use of ternary composite layers. Taking advantage of a novel in-situ phase monitor system, it is possible to control the sensitive deposition process more precisely. The study is initiated by a design synthesis, to achieve optimum reflection and GDD values for a conventional high low stack (HL)n. Afterwards the field intensity is analyzed, and layers affected by highest electric field intensities are exchanged by ternary composites of TaxSiyOz. Both designs have similar target specifications whereby one design is using ternary composites and the other one is distinguished by a (HL)n. The first layers of the stack are switched applying in-situ optical broad band monitoring in conjunction with a forward re-optimization algorithm, which also manipulates the layers remaining for deposition at each switching event. To accomplish the demanded GDD-spectra, the last layers are controlled by a novel in-situ white light interferometer operating in the infrared spectral range. Finally the CMs are measured in a 10.000 on 1 procedure according to ISO 21254 applying pulses with a duration of 130 fs at a central wavelength of 775 nm to determine the laser induced damage threshold.

AB - The present contribution is addressed to an improved method to fabricate dielectric dispersive compensating mirrors (CMs) with an increased laser induced damage threshold (LIDT) by the use of ternary composite layers. Taking advantage of a novel in-situ phase monitor system, it is possible to control the sensitive deposition process more precisely. The study is initiated by a design synthesis, to achieve optimum reflection and GDD values for a conventional high low stack (HL)n. Afterwards the field intensity is analyzed, and layers affected by highest electric field intensities are exchanged by ternary composites of TaxSiyOz. Both designs have similar target specifications whereby one design is using ternary composites and the other one is distinguished by a (HL)n. The first layers of the stack are switched applying in-situ optical broad band monitoring in conjunction with a forward re-optimization algorithm, which also manipulates the layers remaining for deposition at each switching event. To accomplish the demanded GDD-spectra, the last layers are controlled by a novel in-situ white light interferometer operating in the infrared spectral range. Finally the CMs are measured in a 10.000 on 1 procedure according to ISO 21254 applying pulses with a duration of 130 fs at a central wavelength of 775 nm to determine the laser induced damage threshold.

KW - Chirp mirror

KW - Design synthesis

KW - GDD

KW - IBS process

KW - In situ GDD measurement

KW - LIDT

KW - Ternary composites

KW - Ultra fast optics

UR - http://www.scopus.com/inward/record.url?scp=85015698428&partnerID=8YFLogxK

U2 - 10.1117/12.2244835

DO - 10.1117/12.2244835

M3 - Conference contribution

AN - SCOPUS:85015698428

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - 48th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials 2016

PB - SPIE

T2 - 48th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials 2016

Y2 - 25 September 2016 through 28 September 2016

ER -