Details
Originalsprache | Englisch |
---|---|
Aufsatznummer | 150167 |
Fachzeitschrift | Applied surface science |
Jahrgang | 562 |
Frühes Online-Datum | 23 Mai 2021 |
Publikationsstatus | Veröffentlicht - 1 Okt. 2021 |
Abstract
Recent developments of nanostructured coatings have reached a point where extensive investigations within multi-layer systems are necessary for further implementation in novel photonic systems. Although sculptured thin films are explored for decades, no optical and structural measurements have been performed for anisotropic nanostructured multi-layer coatings with different deposition conditions of the dense layer. In this paper, we present extensive morphological analysis on silica nanostructured anisotropic films. Changing the deposition angle from 66° to 84°, indicate the changes in surface filling from 84% to 57%, respectively, while phase retardance has a maximal value of 0.032°/nm at 70° and 72° angles. We also present the investigation of covering such structures with the dense layer at different conditions. As a result, the technology for maintaining initial anisotropic properties is developed for extending spectral difference 1.6 times and phase retardation by 5% in anisotropic multi-layer coatings. Furthermore, we present simulations of growing silica layer using experimental conditions in the Virtual Coater framework resulting in virtual anisotropic films for comparison with measurements. The minimal impact on the anisotropy of porous layer is reached with the deposition of dense layer at 30° angle during constant substrate rotation.
ASJC Scopus Sachgebiete
- Chemie (insg.)
- Allgemeine Chemie
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Physik und Astronomie (insg.)
- Allgemeine Physik und Astronomie
- Physik und Astronomie (insg.)
- Oberflächen und Grenzflächen
- Werkstoffwissenschaften (insg.)
- Oberflächen, Beschichtungen und Folien
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in: Applied surface science, Jahrgang 562, 150167, 01.10.2021.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Impact of deposition conditions on nanostructured anisotropic silica thin films in multilayer interference coatings
AU - Grineviciute, Lina
AU - Badorreck, Holger
AU - Jensen, Lars
AU - Ristau, Detlev
AU - Jupé, Marco
AU - Selskis, Algirdas
AU - Tolenis, Tomas
N1 - Funding Information: The authors thank the Deutsche Forschungsgemeinschaft (DFG) for funding within the cluster of excellence PhoenixD (390833453, EXC 2122). Funding Information: Research also received funding from the Research Council of Lithuania (LMTLT), project UnCoatPower (agreement No S-MIP-20-61).
PY - 2021/10/1
Y1 - 2021/10/1
N2 - Recent developments of nanostructured coatings have reached a point where extensive investigations within multi-layer systems are necessary for further implementation in novel photonic systems. Although sculptured thin films are explored for decades, no optical and structural measurements have been performed for anisotropic nanostructured multi-layer coatings with different deposition conditions of the dense layer. In this paper, we present extensive morphological analysis on silica nanostructured anisotropic films. Changing the deposition angle from 66° to 84°, indicate the changes in surface filling from 84% to 57%, respectively, while phase retardance has a maximal value of 0.032°/nm at 70° and 72° angles. We also present the investigation of covering such structures with the dense layer at different conditions. As a result, the technology for maintaining initial anisotropic properties is developed for extending spectral difference 1.6 times and phase retardation by 5% in anisotropic multi-layer coatings. Furthermore, we present simulations of growing silica layer using experimental conditions in the Virtual Coater framework resulting in virtual anisotropic films for comparison with measurements. The minimal impact on the anisotropy of porous layer is reached with the deposition of dense layer at 30° angle during constant substrate rotation.
AB - Recent developments of nanostructured coatings have reached a point where extensive investigations within multi-layer systems are necessary for further implementation in novel photonic systems. Although sculptured thin films are explored for decades, no optical and structural measurements have been performed for anisotropic nanostructured multi-layer coatings with different deposition conditions of the dense layer. In this paper, we present extensive morphological analysis on silica nanostructured anisotropic films. Changing the deposition angle from 66° to 84°, indicate the changes in surface filling from 84% to 57%, respectively, while phase retardance has a maximal value of 0.032°/nm at 70° and 72° angles. We also present the investigation of covering such structures with the dense layer at different conditions. As a result, the technology for maintaining initial anisotropic properties is developed for extending spectral difference 1.6 times and phase retardation by 5% in anisotropic multi-layer coatings. Furthermore, we present simulations of growing silica layer using experimental conditions in the Virtual Coater framework resulting in virtual anisotropic films for comparison with measurements. The minimal impact on the anisotropy of porous layer is reached with the deposition of dense layer at 30° angle during constant substrate rotation.
KW - Anisotropic coatings
KW - Effective refractive index
KW - Molecular dynamics
KW - Phase retardance
KW - Sculptured thin films
KW - Surface filling
UR - http://www.scopus.com/inward/record.url?scp=85104967224&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2021.150167
DO - 10.1016/j.apsusc.2021.150167
M3 - Article
AN - SCOPUS:85104967224
VL - 562
JO - Applied surface science
JF - Applied surface science
SN - 0169-4332
M1 - 150167
ER -