High-rate deposition of epitaxial layers for efficient low-temperature thin film epitaxial silicon solar cells

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Autoren

  • Lars Oberbeck
  • Jan Schmidt
  • Thomas A. Wagner
  • Ralf B. Bergmann

Externe Organisationen

  • Universität Stuttgart
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Seiten (von - bis)333-340
Seitenumfang8
FachzeitschriftProgress in Photovoltaics: Research and Applications
Jahrgang9
Ausgabenummer5
PublikationsstatusVeröffentlicht - 17 Sept. 2001
Extern publiziertJa

Abstract

Low-temperature deposition of Si for thin-film solar cells has previously been hampered by low deposition rates and low material quality, usually reflected by a low open-circuit voltage of these solar cells. In contrast, ion-assisted deposition produces Si films with a minority-carrier diffusion length of 40 μm, obtained at a record deposition rate of 0.8 μm/min and a deposition temperature of 650°C with a prebake at 810°C. A thin-film Si solar cell with a 20-μm-thick epitaxial layer achieves an open-circuit voltage of 622 mV and a conversion efficiency of 12.7% without any light trapping structures and without high-temperature solar cell process steps.

ASJC Scopus Sachgebiete

Ziele für nachhaltige Entwicklung

Zitieren

High-rate deposition of epitaxial layers for efficient low-temperature thin film epitaxial silicon solar cells. / Oberbeck, Lars; Schmidt, Jan; Wagner, Thomas A. et al.
in: Progress in Photovoltaics: Research and Applications, Jahrgang 9, Nr. 5, 17.09.2001, S. 333-340.

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Download
@article{c7f09ce271ea4a828d4272ed4ad3b900,
title = "High-rate deposition of epitaxial layers for efficient low-temperature thin film epitaxial silicon solar cells",
abstract = "Low-temperature deposition of Si for thin-film solar cells has previously been hampered by low deposition rates and low material quality, usually reflected by a low open-circuit voltage of these solar cells. In contrast, ion-assisted deposition produces Si films with a minority-carrier diffusion length of 40 μm, obtained at a record deposition rate of 0.8 μm/min and a deposition temperature of 650°C with a prebake at 810°C. A thin-film Si solar cell with a 20-μm-thick epitaxial layer achieves an open-circuit voltage of 622 mV and a conversion efficiency of 12.7% without any light trapping structures and without high-temperature solar cell process steps.",
author = "Lars Oberbeck and Jan Schmidt and Wagner, {Thomas A.} and Bergmann, {Ralf B.}",
year = "2001",
month = sep,
day = "17",
doi = "10.1002/pip.385",
language = "English",
volume = "9",
pages = "333--340",
journal = "Progress in Photovoltaics: Research and Applications",
issn = "1062-7995",
publisher = "John Wiley and Sons Ltd",
number = "5",

}

Download

TY - JOUR

T1 - High-rate deposition of epitaxial layers for efficient low-temperature thin film epitaxial silicon solar cells

AU - Oberbeck, Lars

AU - Schmidt, Jan

AU - Wagner, Thomas A.

AU - Bergmann, Ralf B.

PY - 2001/9/17

Y1 - 2001/9/17

N2 - Low-temperature deposition of Si for thin-film solar cells has previously been hampered by low deposition rates and low material quality, usually reflected by a low open-circuit voltage of these solar cells. In contrast, ion-assisted deposition produces Si films with a minority-carrier diffusion length of 40 μm, obtained at a record deposition rate of 0.8 μm/min and a deposition temperature of 650°C with a prebake at 810°C. A thin-film Si solar cell with a 20-μm-thick epitaxial layer achieves an open-circuit voltage of 622 mV and a conversion efficiency of 12.7% without any light trapping structures and without high-temperature solar cell process steps.

AB - Low-temperature deposition of Si for thin-film solar cells has previously been hampered by low deposition rates and low material quality, usually reflected by a low open-circuit voltage of these solar cells. In contrast, ion-assisted deposition produces Si films with a minority-carrier diffusion length of 40 μm, obtained at a record deposition rate of 0.8 μm/min and a deposition temperature of 650°C with a prebake at 810°C. A thin-film Si solar cell with a 20-μm-thick epitaxial layer achieves an open-circuit voltage of 622 mV and a conversion efficiency of 12.7% without any light trapping structures and without high-temperature solar cell process steps.

UR - http://www.scopus.com/inward/record.url?scp=0035446356&partnerID=8YFLogxK

U2 - 10.1002/pip.385

DO - 10.1002/pip.385

M3 - Article

AN - SCOPUS:0035446356

VL - 9

SP - 333

EP - 340

JO - Progress in Photovoltaics: Research and Applications

JF - Progress in Photovoltaics: Research and Applications

SN - 1062-7995

IS - 5

ER -

Von denselben Autoren