TY - JOUR

T1 - High-efficiency silicon metasurface mirror on a sapphire substrate

AU - Matiushechkina, Mariia

AU - Evlyukhin, Andrey B.

AU - Zenin, Vladimir A.

AU - Heurs, Michèle

AU - Chichkov, Boris N.

N1 - Funding Information: Deutsche Forschungsgemeinschaft (DFG), Germany (EXC 2122, Project ID 390833453 ) and (EXC 2123, Project ID 390837967 ), Villum Fonden, Denmark (Grant No. 40707 ). Funding Information: Authors acknowledge financial support from the Deutsche Forschungsgemeinschaft, Germany (DFG, German Research Foundation) under Germany’s Excellence Strategy within the Cluster of Excellence PhoenixD (EXC 2122, Project ID 390833453 ) and the Cluster of Excellence QuantumFrontiers (EXC 2123, Project ID 390837967 ).V.A.Z. acknowledges financial support from Villum Fonden, Denmark (Grant No. 40707 ).

PY - 2023/4

Y1 - 2023/4

N2 - For a possible implementation of high-efficiency Si-nanosphere metasurface mirrors functioning at telecom wavelengths in future gravitational wave detectors, exact dimensional and configuration parameters of the total system, including substrate and protective coating, have to be determined a priori. The reflectivity of such multi-layer metasurfaces with embedded Si nanoparticles and their potential limitations need to be investigated. Here we present the results on how the substrate and protective layer influence optical properties and demonstrate how dimensional and material characteristics of the structure alter light reflectivity. Additionally, we consider the impact of manufacturing imperfections, such as fluctuations of Si nanoparticle sizes and their exact placement, on the metasurface reflectivity. Finally, we demonstrate how high reflectivity of the system can be preserved under variations of the protective layer thickness, incident angle of light, and its polarization.

AB - For a possible implementation of high-efficiency Si-nanosphere metasurface mirrors functioning at telecom wavelengths in future gravitational wave detectors, exact dimensional and configuration parameters of the total system, including substrate and protective coating, have to be determined a priori. The reflectivity of such multi-layer metasurfaces with embedded Si nanoparticles and their potential limitations need to be investigated. Here we present the results on how the substrate and protective layer influence optical properties and demonstrate how dimensional and material characteristics of the structure alter light reflectivity. Additionally, we consider the impact of manufacturing imperfections, such as fluctuations of Si nanoparticle sizes and their exact placement, on the metasurface reflectivity. Finally, we demonstrate how high reflectivity of the system can be preserved under variations of the protective layer thickness, incident angle of light, and its polarization.

KW - Metasurface

KW - Optics in gravitational wave interferometers

KW - Silicon nano-coating for telecom wavelength

UR - http://www.scopus.com/inward/record.url?scp=85149268766&partnerID=8YFLogxK

U2 - 10.1016/j.optmat.2023.113618

DO - 10.1016/j.optmat.2023.113618

M3 - Article

VL - 138

JO - Optical materials

JF - Optical materials

SN - 0925-3467

M1 - 113618

ER -