Details
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 2391-2399 |
| Seitenumfang | 9 |
| Fachzeitschrift | Journal of Optoelectronics and Advanced Materials |
| Jahrgang | 9 |
| Ausgabenummer | 8 |
| Publikationsstatus | Veröffentlicht - Aug. 2007 |
| Extern publiziert | Ja |
Abstract
This paper gives a comprehensive study of designing, fabrication and determination of damage thresholds of single and double layer antireflection coatings. Single quarter wave layers were prepared form MgF2 and mixtures of MgF2 with other fluorides. An oxide-fluoride mixture was also tested. Double layer "V" coatings were studied taking SiO2 and MgF 2 as low refractive index material in combination with HfO 2, ZrO2, Ta2O5, Nd2O 3, CeO2 and TiO2 as a high refractive index material next to the substrate. All coatings were prepared in a Leybold-Heraeus vacuum coating pant at a base pressure of < 1E-5 mbar on Suprasil substrates by conventional electron beam evaporation method. Film thickness was controlled by usual optical method. Reflectance, scattering, absorption and damage threshold were measured. Damage morphology was done by Nomarsky and scanning electron microscopy (SEM). Influence of barrier layers on damage thresholds of AR-2 systems was also investigated. Besides this, an overcoat effect on AR-2 systems with MgF2 as an outer layer was also observed. Substrate polishing effects on damage threshold of bare as well as AR-coated systems are also reported.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Atom- und Molekularphysik sowie Optik
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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in: Journal of Optoelectronics and Advanced Materials, Jahrgang 9, Nr. 8, 08.2007, S. 2391-2399.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - High damage threshold single and double layer antireflection (AR) coatings for Nd:YAG Laser
T2 - Conventional systems
AU - Javed Akhtar, S. M.
AU - Ristau, Detlev
AU - Welling, Herbert
AU - Ebert, Johannes
PY - 2007/8
Y1 - 2007/8
N2 - This paper gives a comprehensive study of designing, fabrication and determination of damage thresholds of single and double layer antireflection coatings. Single quarter wave layers were prepared form MgF2 and mixtures of MgF2 with other fluorides. An oxide-fluoride mixture was also tested. Double layer "V" coatings were studied taking SiO2 and MgF 2 as low refractive index material in combination with HfO 2, ZrO2, Ta2O5, Nd2O 3, CeO2 and TiO2 as a high refractive index material next to the substrate. All coatings were prepared in a Leybold-Heraeus vacuum coating pant at a base pressure of < 1E-5 mbar on Suprasil substrates by conventional electron beam evaporation method. Film thickness was controlled by usual optical method. Reflectance, scattering, absorption and damage threshold were measured. Damage morphology was done by Nomarsky and scanning electron microscopy (SEM). Influence of barrier layers on damage thresholds of AR-2 systems was also investigated. Besides this, an overcoat effect on AR-2 systems with MgF2 as an outer layer was also observed. Substrate polishing effects on damage threshold of bare as well as AR-coated systems are also reported.
AB - This paper gives a comprehensive study of designing, fabrication and determination of damage thresholds of single and double layer antireflection coatings. Single quarter wave layers were prepared form MgF2 and mixtures of MgF2 with other fluorides. An oxide-fluoride mixture was also tested. Double layer "V" coatings were studied taking SiO2 and MgF 2 as low refractive index material in combination with HfO 2, ZrO2, Ta2O5, Nd2O 3, CeO2 and TiO2 as a high refractive index material next to the substrate. All coatings were prepared in a Leybold-Heraeus vacuum coating pant at a base pressure of < 1E-5 mbar on Suprasil substrates by conventional electron beam evaporation method. Film thickness was controlled by usual optical method. Reflectance, scattering, absorption and damage threshold were measured. Damage morphology was done by Nomarsky and scanning electron microscopy (SEM). Influence of barrier layers on damage thresholds of AR-2 systems was also investigated. Besides this, an overcoat effect on AR-2 systems with MgF2 as an outer layer was also observed. Substrate polishing effects on damage threshold of bare as well as AR-coated systems are also reported.
KW - Antireflection coatings
KW - High damage threshold coatings
KW - Laser damage
UR - http://www.scopus.com/inward/record.url?scp=38549154653&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:38549154653
VL - 9
SP - 2391
EP - 2399
JO - Journal of Optoelectronics and Advanced Materials
JF - Journal of Optoelectronics and Advanced Materials
SN - 1454-4164
IS - 8
ER -