Details
| Titel in Übersetzung | Fabrication of co-resonantly coupled cantilever sensors with geometric eigenfrequency matching |
|---|---|
| Originalsprache | Deutsch |
| Titel des Sammelwerks | MikroSystemTechnik Kongress 2023 |
| Untertitel | Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings |
| Herausgeber (Verlag) | VDE Verlag GmbH |
| Seiten | 470-472 |
| Seitenumfang | 3 |
| ISBN (elektronisch) | 9783800762040 |
| Publikationsstatus | Veröffentlicht - 2023 |
| Veranstaltung | MikroSystemTechnik Kongress 2023: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat - Dresden, Deutschland Dauer: 23 Okt. 2023 → 25 Okt. 2023 |
Abstract
The concept of co-resonant coupling enables a significant sensitivity increase of dynamic mode cantilever sensors, while maintaining oscillation detection with established methods. The concept is based on mechanical coupling and eigenfrequency matching of a microcantilever and a low-stiffness nanocantilever. Fabrication of sensors with predefined parameters (e.g. sensitivity, linear range) requires very accurate eigenfrequency matching that can be achieved by appropriate definition of the cantilever geometries. As even small deviations, especially for the nanocantilever's thickness and/or length, can already lead to rather large alterations of the matching state and change of sensors parameters, a fabrication process with high precision is crucial. Here, we report such a fabrication process for controlled and very defined geometrically eigenfrequency matched co-resonantly coupled cantilever sensors.
ASJC Scopus Sachgebiete
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Werkstoffwissenschaften (insg.)
- Oberflächen, Beschichtungen und Folien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Physik und Astronomie (insg.)
- Atom- und Molekularphysik sowie Optik
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MikroSystemTechnik Kongress 2023: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings. VDE Verlag GmbH, 2023. S. 470-472.
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Herstellung ko-resonant gekoppelter Cantilever-Sensoren mit geometrischer Frequenzanpassung
AU - Lampouras, Ioannis
AU - Körner, Julia
N1 - Publisher Copyright: © VDE VERLAG GMBH ∙ Berlin ∙ Offenbach.
PY - 2023
Y1 - 2023
N2 - The concept of co-resonant coupling enables a significant sensitivity increase of dynamic mode cantilever sensors, while maintaining oscillation detection with established methods. The concept is based on mechanical coupling and eigenfrequency matching of a microcantilever and a low-stiffness nanocantilever. Fabrication of sensors with predefined parameters (e.g. sensitivity, linear range) requires very accurate eigenfrequency matching that can be achieved by appropriate definition of the cantilever geometries. As even small deviations, especially for the nanocantilever's thickness and/or length, can already lead to rather large alterations of the matching state and change of sensors parameters, a fabrication process with high precision is crucial. Here, we report such a fabrication process for controlled and very defined geometrically eigenfrequency matched co-resonantly coupled cantilever sensors.
AB - The concept of co-resonant coupling enables a significant sensitivity increase of dynamic mode cantilever sensors, while maintaining oscillation detection with established methods. The concept is based on mechanical coupling and eigenfrequency matching of a microcantilever and a low-stiffness nanocantilever. Fabrication of sensors with predefined parameters (e.g. sensitivity, linear range) requires very accurate eigenfrequency matching that can be achieved by appropriate definition of the cantilever geometries. As even small deviations, especially for the nanocantilever's thickness and/or length, can already lead to rather large alterations of the matching state and change of sensors parameters, a fabrication process with high precision is crucial. Here, we report such a fabrication process for controlled and very defined geometrically eigenfrequency matched co-resonantly coupled cantilever sensors.
UR - http://www.scopus.com/inward/record.url?scp=85196915107&partnerID=8YFLogxK
M3 - Aufsatz in Konferenzband
AN - SCOPUS:85196915107
SP - 470
EP - 472
BT - MikroSystemTechnik Kongress 2023
PB - VDE Verlag GmbH
T2 - MikroSystemTechnik Kongress 2023: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat
Y2 - 23 October 2023 through 25 October 2023
ER -