Growth of crystalline praseodymium oxide on silicon

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Autoren

  • H. J. Osten
  • J. P. Liu
  • E. Bugiel
  • H. J. Muüssig
  • P. Zaumseil

Externe Organisationen

  • Leibniz-Institut für innovative Mikroelektronik (IHP)
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Seiten (von - bis)229-234
Seitenumfang6
FachzeitschriftJournal of crystal growth
Jahrgang235
Ausgabenummer1-4
Frühes Online-Datum6 Nov. 2001
PublikationsstatusVeröffentlicht - Feb. 2002
Extern publiziertJa

Abstract

We present the results for crystalline growth of praseodymium oxide on Si as a potential high-K dielectric with promising electrical properties. All layer growth experiments were performed using solid source molecular beam epitaxy. The initial stages of growth were studied by scanning tunneling microscopy. On Si(0 0 1) surfaces, crystalline Pr2O3 grows as (1 1 0)-domains, with two orthogonal in-plane orientations. Epitaxial silicon overgrowth seems to be impossible. We obtain perfect epitaxial growth on Si(1 1 1). These layers can also be overgrown epitaxially with silicon.

ASJC Scopus Sachgebiete

Zitieren

Growth of crystalline praseodymium oxide on silicon. / Osten, H. J.; Liu, J. P.; Bugiel, E. et al.
in: Journal of crystal growth, Jahrgang 235, Nr. 1-4, 02.2002, S. 229-234.

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Osten, HJ, Liu, JP, Bugiel, E, Muüssig, HJ & Zaumseil, P 2002, 'Growth of crystalline praseodymium oxide on silicon', Journal of crystal growth, Jg. 235, Nr. 1-4, S. 229-234. https://doi.org/10.1016/S0022-0248(01)01777-8
Osten, H. J., Liu, J. P., Bugiel, E., Muüssig, H. J., & Zaumseil, P. (2002). Growth of crystalline praseodymium oxide on silicon. Journal of crystal growth, 235(1-4), 229-234. https://doi.org/10.1016/S0022-0248(01)01777-8
Osten HJ, Liu JP, Bugiel E, Muüssig HJ, Zaumseil P. Growth of crystalline praseodymium oxide on silicon. Journal of crystal growth. 2002 Feb;235(1-4):229-234. Epub 2001 Nov 6. doi: 10.1016/S0022-0248(01)01777-8
Osten, H. J. ; Liu, J. P. ; Bugiel, E. et al. / Growth of crystalline praseodymium oxide on silicon. in: Journal of crystal growth. 2002 ; Jahrgang 235, Nr. 1-4. S. 229-234.
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AU - Liu, J. P.

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AU - Muüssig, H. J.

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