Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Excimer Lasers, Optics, and Applications |
| Untertitel | 12-13 February 1997, San Jose, California |
| Erscheinungsort | Bellingham |
| Herausgeber (Verlag) | SPIE |
| Seiten | 150-158 |
| Seitenumfang | 9 |
| ISBN (Print) | 0-8194-2403-X |
| Publikationsstatus | Veröffentlicht - 31 März 1997 |
| Extern publiziert | Ja |
| Veranstaltung | Excimer Lasers, Optics, and Applications 1997 - San Jose, USA / Vereinigte Staaten Dauer: 8 Feb. 1997 → 14 Feb. 1997 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Herausgeber (Verlag) | SPIE |
| Band | 2992 |
| ISSN (Print) | 0277-786X |
Abstract
The development of new processes for the micro-treatment of materials is the basis for increasing integration and miniaturization of mechanical, optical and electronic components. Pulsed high power excimer lasers offer, in combination with a micro-machining system, the possibility of manufacturing highly complex components in different materials like ceramics, glass or metals. Because of the increasing number of technical applications, the need for automatic processing has grown in the last few years. While complete working stations are available for Nd:YAG and CO2 lasers, there is a lack for automatic micro- removal with excimer lasers. For complex microstructures like microoptics, manual programming of the workpiece handling system becomes uneconomic because of the very high number of laser pulses required. Especially for prototypes and small batches where the workpiece geometries change quickly, the development of an universal and automatic machining concept plays a key role for this technology. For this reason, a general machining concept based on excimer laser removal has been realized beginning with the possibility to construct the workpiece geometry by CAD-design tools. A pre-processor allows to calculate the removal volume based on laser specific ablation volumes. The superposition of each laser pulse removal leads to complex three dimensional surface structures. Moreover, a general movement strategy optimizes the processing speed. For closing the process chain the realized pre-processor automatically generates the necessary NC-data for the implemented CNC-control system. Functionality of this concept has been proven by manufacturing different two and three dimensional micro-structures like micro-optical components.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
Excimer Lasers, Optics, and Applications: 12-13 February 1997, San Jose, California. Bellingham: SPIE, 1997. S. 150-158 (Proceedings of SPIE - The International Society for Optical Engineering; Band 2992).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - General machining concept for producing micro-optics with high-power uv-lasers
AU - Tönshoff, Hans Kurt
AU - Overmeyer, Ludger
AU - Ostendorf, Andreas
AU - Wais, Johannes
PY - 1997/3/31
Y1 - 1997/3/31
N2 - The development of new processes for the micro-treatment of materials is the basis for increasing integration and miniaturization of mechanical, optical and electronic components. Pulsed high power excimer lasers offer, in combination with a micro-machining system, the possibility of manufacturing highly complex components in different materials like ceramics, glass or metals. Because of the increasing number of technical applications, the need for automatic processing has grown in the last few years. While complete working stations are available for Nd:YAG and CO2 lasers, there is a lack for automatic micro- removal with excimer lasers. For complex microstructures like microoptics, manual programming of the workpiece handling system becomes uneconomic because of the very high number of laser pulses required. Especially for prototypes and small batches where the workpiece geometries change quickly, the development of an universal and automatic machining concept plays a key role for this technology. For this reason, a general machining concept based on excimer laser removal has been realized beginning with the possibility to construct the workpiece geometry by CAD-design tools. A pre-processor allows to calculate the removal volume based on laser specific ablation volumes. The superposition of each laser pulse removal leads to complex three dimensional surface structures. Moreover, a general movement strategy optimizes the processing speed. For closing the process chain the realized pre-processor automatically generates the necessary NC-data for the implemented CNC-control system. Functionality of this concept has been proven by manufacturing different two and three dimensional micro-structures like micro-optical components.
AB - The development of new processes for the micro-treatment of materials is the basis for increasing integration and miniaturization of mechanical, optical and electronic components. Pulsed high power excimer lasers offer, in combination with a micro-machining system, the possibility of manufacturing highly complex components in different materials like ceramics, glass or metals. Because of the increasing number of technical applications, the need for automatic processing has grown in the last few years. While complete working stations are available for Nd:YAG and CO2 lasers, there is a lack for automatic micro- removal with excimer lasers. For complex microstructures like microoptics, manual programming of the workpiece handling system becomes uneconomic because of the very high number of laser pulses required. Especially for prototypes and small batches where the workpiece geometries change quickly, the development of an universal and automatic machining concept plays a key role for this technology. For this reason, a general machining concept based on excimer laser removal has been realized beginning with the possibility to construct the workpiece geometry by CAD-design tools. A pre-processor allows to calculate the removal volume based on laser specific ablation volumes. The superposition of each laser pulse removal leads to complex three dimensional surface structures. Moreover, a general movement strategy optimizes the processing speed. For closing the process chain the realized pre-processor automatically generates the necessary NC-data for the implemented CNC-control system. Functionality of this concept has been proven by manufacturing different two and three dimensional micro-structures like micro-optical components.
KW - Ablation
KW - Glass structuring
KW - Machining concept
KW - Mask-projection
KW - Micro machining
KW - UV-lasers
UR - http://www.scopus.com/inward/record.url?scp=1342274470&partnerID=8YFLogxK
U2 - 10.1117/12.270094
DO - 10.1117/12.270094
M3 - Conference contribution
AN - SCOPUS:1342274470
SN - 0-8194-2403-X
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 150
EP - 158
BT - Excimer Lasers, Optics, and Applications
PB - SPIE
CY - Bellingham
T2 - Excimer Lasers, Optics, and Applications 1997
Y2 - 8 February 1997 through 14 February 1997
ER -