Focus-based automated alignment for laser direct writing

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

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OriginalspracheEnglisch
Titel des SammelwerksDigital Optical Technologies 2023
Herausgeber/-innenBernard C. Kress, Jurgen W. Czarske
Herausgeber (Verlag)SPIE
ISBN (elektronisch)9781510664579
PublikationsstatusVeröffentlicht - 7 Aug. 2023
VeranstaltungSPIE Digital Optical Technologies - Munich, Deutschland
Dauer: 26 Juni 202330 Juni 2023

Publikationsreihe

NameProceedings of SPIE - The International Society for Optical Engineering
Band12624
ISSN (Print)0277-786X
ISSN (elektronisch)1996-756X

Abstract

We aim to integrate two-photon polymerization (TPP) in a fully digitalized and automated workflow for micro- and nanooptics production. This requires linking the coordinate system of the writing laser scanner to the geometry of the sample or previously fabricated structures on the sample. We developed a fast layer detection algorithm, which determines the axial position and the tilt angles of both interface planes of the photosensitive material using the integrated microscope camera of the TPP system. Furthermore, we identify the shear angles between the camera and the lateral scanner axes. The individual measurement results are stored and accessible via direct-written identification QR code on the sample itself. This is an important step towards an individualized automatic workflow based on digital twins.

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Focus-based automated alignment for laser direct writing. / Caspary, Reinhard; Zheng, Lei; Günther, Axel et al.
Digital Optical Technologies 2023. Hrsg. / Bernard C. Kress; Jurgen W. Czarske. SPIE, 2023. 126240C (Proceedings of SPIE - The International Society for Optical Engineering; Band 12624).

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Caspary, R, Zheng, L, Günther, A & Roth, B 2023, Focus-based automated alignment for laser direct writing. in BC Kress & JW Czarske (Hrsg.), Digital Optical Technologies 2023., 126240C, Proceedings of SPIE - The International Society for Optical Engineering, Bd. 12624, SPIE, SPIE Digital Optical Technologies, Munich, Deutschland, 26 Juni 2023. https://doi.org/10.1117/12.2675821
Caspary, R., Zheng, L., Günther, A., & Roth, B. (2023). Focus-based automated alignment for laser direct writing. In B. C. Kress, & J. W. Czarske (Hrsg.), Digital Optical Technologies 2023 Artikel 126240C (Proceedings of SPIE - The International Society for Optical Engineering; Band 12624). SPIE. https://doi.org/10.1117/12.2675821
Caspary R, Zheng L, Günther A, Roth B. Focus-based automated alignment for laser direct writing. in Kress BC, Czarske JW, Hrsg., Digital Optical Technologies 2023. SPIE. 2023. 126240C. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2675821
Caspary, Reinhard ; Zheng, Lei ; Günther, Axel et al. / Focus-based automated alignment for laser direct writing. Digital Optical Technologies 2023. Hrsg. / Bernard C. Kress ; Jurgen W. Czarske. SPIE, 2023. (Proceedings of SPIE - The International Society for Optical Engineering).
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