Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Optical Measurement Systems for Industrial Inspection VI |
| Publikationsstatus | Veröffentlicht - 17 Juni 2009 |
| Extern publiziert | Ja |
| Veranstaltung | Optical Measurement Systems for Industrial Inspection VI - Munich, Deutschland Dauer: 15 Juni 2009 → 18 Juni 2009 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Band | 7389 |
| ISSN (Print) | 0277-786X |
Abstract
Optical scatter measurements are the basis for efficient methods in the quality management of optical components in all production steps. Especially, the Total Scattering (TS) of an optical surface can be evaluated in respect of the roughness and the state of cleanliness. In many applications defects on the surface or the imperfections in the bulk of the components are of major interest and have to be controlled systematically. In this paper a fast TS measurement procedure is presented for flat components, which can map a surface completely in the timescale of few ten to hundred seconds. The mapping covers the entire test area with spatial steps of less than one micron. The set-up can be adapted to wavelengths from the UV- to the IR- spectral ranges. The present study is dedicated to the technical specifications, problems during implementation and the resolution limits of the Fast TS set-up. TS measurements on samples with defined micro structures are employed to demonstrate the spatial resolution. Results of TS measurements in forward and backward direction will be presented for selected samples with defined particle distribution and sizes.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
Optical Measurement Systems for Industrial Inspection VI. 2009. 73890S (Proceedings of SPIE - The International Society for Optical Engineering; Band 7389).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Fast Total Scattering facility for 2D inspection of optical and functional surfaces
AU - Kadkhoda, Puja
AU - Sakiew, Wjatscheslaw
AU - Günster, Stefan
AU - Ristau, Detlev
PY - 2009/6/17
Y1 - 2009/6/17
N2 - Optical scatter measurements are the basis for efficient methods in the quality management of optical components in all production steps. Especially, the Total Scattering (TS) of an optical surface can be evaluated in respect of the roughness and the state of cleanliness. In many applications defects on the surface or the imperfections in the bulk of the components are of major interest and have to be controlled systematically. In this paper a fast TS measurement procedure is presented for flat components, which can map a surface completely in the timescale of few ten to hundred seconds. The mapping covers the entire test area with spatial steps of less than one micron. The set-up can be adapted to wavelengths from the UV- to the IR- spectral ranges. The present study is dedicated to the technical specifications, problems during implementation and the resolution limits of the Fast TS set-up. TS measurements on samples with defined micro structures are employed to demonstrate the spatial resolution. Results of TS measurements in forward and backward direction will be presented for selected samples with defined particle distribution and sizes.
AB - Optical scatter measurements are the basis for efficient methods in the quality management of optical components in all production steps. Especially, the Total Scattering (TS) of an optical surface can be evaluated in respect of the roughness and the state of cleanliness. In many applications defects on the surface or the imperfections in the bulk of the components are of major interest and have to be controlled systematically. In this paper a fast TS measurement procedure is presented for flat components, which can map a surface completely in the timescale of few ten to hundred seconds. The mapping covers the entire test area with spatial steps of less than one micron. The set-up can be adapted to wavelengths from the UV- to the IR- spectral ranges. The present study is dedicated to the technical specifications, problems during implementation and the resolution limits of the Fast TS set-up. TS measurements on samples with defined micro structures are employed to demonstrate the spatial resolution. Results of TS measurements in forward and backward direction will be presented for selected samples with defined particle distribution and sizes.
KW - ISO 13696
KW - Micro- and Nanoparticles
KW - Surface inspection
KW - Total Scattering
UR - http://www.scopus.com/inward/record.url?scp=69949150303&partnerID=8YFLogxK
U2 - 10.1117/12.827864
DO - 10.1117/12.827864
M3 - Conference contribution
AN - SCOPUS:69949150303
SN - 9780819476722
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Measurement Systems for Industrial Inspection VI
T2 - Optical Measurement Systems for Industrial Inspection VI
Y2 - 15 June 2009 through 18 June 2009
ER -