Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Optical Systems Design 2015 |
| Untertitel | Optical Fabrication, Testing, and Metrology V |
| Herausgeber (Verlag) | SPIE |
| ISBN (elektronisch) | 9781628418170 |
| Publikationsstatus | Veröffentlicht - 24 Sept. 2015 |
| Extern publiziert | Ja |
| Veranstaltung | Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V - Jena, Deutschland Dauer: 7 Sept. 2015 → 10 Sept. 2015 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Band | 9628 |
| ISSN (Print) | 0277-786X |
| ISSN (elektronisch) | 1996-756X |
Abstract
A system for two dimensional mapping of Total Scattering (TS) and Transmission (T) of optical flat surfaces in the spectral range from deep UV to NIR will be introduced. The adaptation of the scatter detector concept for the special requirements of the DUV range will be discussed. Also, the specifications of the set-up such as working ambient, background level, and data calibration procedure demonstrate the performance of the system for the analytical tasks in industrial optics production. On the basis of the presented measurement facility, the essential properties of bare flat optics in respect of their polishing state, roughness level, state of cleaning and defect distribution can be investigated with the TS system in a nondestructive way. The homogeneity of the whole surface of an optical component can be tested with a defined lateral resolution. The knowledge of the inhomogeneity is an important indication for the quality evaluation of optical components. We present the TS result and the calculated defect density distributions of selected components, which are handled by different cleaning procedures. Also, additional effects in TS and T will be outlined and compared with spectral photometric measurement.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V. SPIE, 2015. 96280N (Proceedings of SPIE - The International Society for Optical Engineering; Band 9628).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Facility for fast mapping of total scattering and transmission in the spectral range from DUV- NIR
AU - Kadkhoda, P.
AU - Jensen, Lars
AU - Ristau, Detlev
PY - 2015/9/24
Y1 - 2015/9/24
N2 - A system for two dimensional mapping of Total Scattering (TS) and Transmission (T) of optical flat surfaces in the spectral range from deep UV to NIR will be introduced. The adaptation of the scatter detector concept for the special requirements of the DUV range will be discussed. Also, the specifications of the set-up such as working ambient, background level, and data calibration procedure demonstrate the performance of the system for the analytical tasks in industrial optics production. On the basis of the presented measurement facility, the essential properties of bare flat optics in respect of their polishing state, roughness level, state of cleaning and defect distribution can be investigated with the TS system in a nondestructive way. The homogeneity of the whole surface of an optical component can be tested with a defined lateral resolution. The knowledge of the inhomogeneity is an important indication for the quality evaluation of optical components. We present the TS result and the calculated defect density distributions of selected components, which are handled by different cleaning procedures. Also, additional effects in TS and T will be outlined and compared with spectral photometric measurement.
AB - A system for two dimensional mapping of Total Scattering (TS) and Transmission (T) of optical flat surfaces in the spectral range from deep UV to NIR will be introduced. The adaptation of the scatter detector concept for the special requirements of the DUV range will be discussed. Also, the specifications of the set-up such as working ambient, background level, and data calibration procedure demonstrate the performance of the system for the analytical tasks in industrial optics production. On the basis of the presented measurement facility, the essential properties of bare flat optics in respect of their polishing state, roughness level, state of cleaning and defect distribution can be investigated with the TS system in a nondestructive way. The homogeneity of the whole surface of an optical component can be tested with a defined lateral resolution. The knowledge of the inhomogeneity is an important indication for the quality evaluation of optical components. We present the TS result and the calculated defect density distributions of selected components, which are handled by different cleaning procedures. Also, additional effects in TS and T will be outlined and compared with spectral photometric measurement.
KW - Defect detection
KW - DUV spectral range
KW - ISO 13696
KW - Total Scattering
KW - Transmission
UR - http://www.scopus.com/inward/record.url?scp=84960496064&partnerID=8YFLogxK
U2 - 10.1117/12.2191311
DO - 10.1117/12.2191311
M3 - Conference contribution
AN - SCOPUS:84960496064
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Systems Design 2015
PB - SPIE
T2 - Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
Y2 - 7 September 2015 through 10 September 2015
ER -