Fabrication of Submicron Structures by Three-Dimensional Laser Lithography

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Autorschaft

  • I. I. Shishkin
  • M. V. Rybin
  • K. B. Samusev
  • M. F. Limonov
  • R. V. Kiyan
  • B. N. Chichkov
  • Yu S. Kivshar
  • P. A. Belov

Externe Organisationen

  • St. Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO)
  • RAS - Ioffe Physico Technical Institute
  • Laser Zentrum Hannover e.V. (LZH)
  • Australian National University
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Seiten (von - bis)531-534
Seitenumfang4
FachzeitschriftJETP letters
Jahrgang99
Ausgabenummer9
PublikationsstatusVeröffentlicht - 25 Juli 2014
Extern publiziertJa

Abstract

As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.

ASJC Scopus Sachgebiete

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Fabrication of Submicron Structures by Three-Dimensional Laser Lithography. / Shishkin, I. I.; Rybin, M. V.; Samusev, K. B. et al.
in: JETP letters, Jahrgang 99, Nr. 9, 25.07.2014, S. 531-534.

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Shishkin, II, Rybin, MV, Samusev, KB, Limonov, MF, Kiyan, RV, Chichkov, BN, Kivshar, YS & Belov, PA 2014, 'Fabrication of Submicron Structures by Three-Dimensional Laser Lithography', JETP letters, Jg. 99, Nr. 9, S. 531-534. https://doi.org/10.1134/S0021364014090112
Shishkin, I. I., Rybin, M. V., Samusev, K. B., Limonov, M. F., Kiyan, R. V., Chichkov, B. N., Kivshar, Y. S., & Belov, P. A. (2014). Fabrication of Submicron Structures by Three-Dimensional Laser Lithography. JETP letters, 99(9), 531-534. https://doi.org/10.1134/S0021364014090112
Shishkin II, Rybin MV, Samusev KB, Limonov MF, Kiyan RV, Chichkov BN et al. Fabrication of Submicron Structures by Three-Dimensional Laser Lithography. JETP letters. 2014 Jul 25;99(9):531-534. doi: 10.1134/S0021364014090112
Shishkin, I. I. ; Rybin, M. V. ; Samusev, K. B. et al. / Fabrication of Submicron Structures by Three-Dimensional Laser Lithography. in: JETP letters. 2014 ; Jahrgang 99, Nr. 9. S. 531-534.
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