Fabrication of coupled quantum dot arrays with a 100–150 nm period

Publikation: Beitrag in FachzeitschriftArtikelForschung

Autoren

  • K. Y. Lee
  • D. P. Kern
  • K. Ismail
  • Rolf Haug
  • T. P. Smith
  • W. T. Masselink
  • J. M. Hong

Externe Organisationen

  • IBM
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Aufsatznummer1366-1370
FachzeitschriftJournal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Jahrgang8
Ausgabenummer6
PublikationsstatusVeröffentlicht - Nov. 1990
Extern publiziertJa

Zitieren

Fabrication of coupled quantum dot arrays with a 100–150 nm period. / Lee, K. Y.; Kern, D. P.; Ismail, K. et al.
in: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, Jahrgang 8, Nr. 6, 1366-1370, 11.1990.

Publikation: Beitrag in FachzeitschriftArtikelForschung

Lee KY, Kern DP, Ismail K, Haug R, Smith TP, Masselink WT et al. Fabrication of coupled quantum dot arrays with a 100–150 nm period. Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena. 1990 Nov;8(6):1366-1370. doi: 10.1116/1.585079
Download
@article{7789c92522c743e6a5d46f36495b9727,
title = "Fabrication of coupled quantum dot arrays with a 100–150 nm period",
author = "Lee, {K. Y.} and Kern, {D. P.} and K. Ismail and Rolf Haug and Smith, {T. P.} and Masselink, {W. T.} and Hong, {J. M.}",
year = "1990",
month = nov,
doi = "10.1116/1.585079",
language = "English",
volume = "8",
journal = "Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena",
issn = "2166-2746",
publisher = "AVS Science and Technology Society",
number = "6",

}

Download

TY - JOUR

T1 - Fabrication of coupled quantum dot arrays with a 100–150 nm period

AU - Lee, K. Y.

AU - Kern, D. P.

AU - Ismail, K.

AU - Haug, Rolf

AU - Smith, T. P.

AU - Masselink, W. T.

AU - Hong, J. M.

PY - 1990/11

Y1 - 1990/11

U2 - 10.1116/1.585079

DO - 10.1116/1.585079

M3 - Article

VL - 8

JO - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

JF - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

SN - 2166-2746

IS - 6

M1 - 1366-1370

ER -

Von denselben Autoren