Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Magnetic Materials, Processes, and Devices 12 |
| Herausgeber (Verlag) | Electrochemical Society, Inc. |
| Seiten | 175-187 |
| Seitenumfang | 13 |
| Auflage | 10 |
| ISBN (Print) | 9781607683582 |
| Publikationsstatus | Veröffentlicht - 2013 |
| Veranstaltung | 12th International Symposium on Magnetic Materials, Processes and Devices - PRiME 2012 - Honolulu, HI, USA / Vereinigte Staaten Dauer: 8 Okt. 2012 → 10 Okt. 2012 |
Publikationsreihe
| Name | ECS Transactions |
|---|---|
| Nummer | 10 |
| Band | 50 |
| ISSN (Print) | 1938-5862 |
| ISSN (elektronisch) | 1938-6737 |
Abstract
The standard linear Inductosyn® system consists of two measurement elements, a scale and a slider. The stationary scale contains a single meander winding, while the moving slider has two meander windings for sensing. Unlike the standard Inductosyn®, a second generation micro Inductosyn® system has four sensing windings, which enables to correct a wedge shaped air gap between scale and slide due to a misalignment occurring during the final assembly process. As its first generation micro Inductosyn® predecessor, it features magnetic flux guides not found in the standard Inductosyn® system to improve coupling. The micro displacement sensor was fabricated using Micro Electro-mechanical System (MEMS) technology. The sensor components, such as meander windings and flux guides, were fabricated by electrodeposition. Moreover, PECVD was used to create an insulating layer between these components. In order to evaluate the system, a mechanical test fixture and an electronic measurement system were created.
ASJC Scopus Sachgebiete
- Ingenieurwesen (insg.)
- Allgemeiner Maschinenbau
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Magnetic Materials, Processes, and Devices 12. 10. Aufl. Electrochemical Society, Inc., 2013. S. 175-187 (ECS Transactions; Band 50, Nr. 10).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Fabrication and characterization of an improved micro Inductosyn®
AU - Miletić, D.
AU - Flügge, J.
AU - Gatzen, H. H.
PY - 2013
Y1 - 2013
N2 - The standard linear Inductosyn® system consists of two measurement elements, a scale and a slider. The stationary scale contains a single meander winding, while the moving slider has two meander windings for sensing. Unlike the standard Inductosyn®, a second generation micro Inductosyn® system has four sensing windings, which enables to correct a wedge shaped air gap between scale and slide due to a misalignment occurring during the final assembly process. As its first generation micro Inductosyn® predecessor, it features magnetic flux guides not found in the standard Inductosyn® system to improve coupling. The micro displacement sensor was fabricated using Micro Electro-mechanical System (MEMS) technology. The sensor components, such as meander windings and flux guides, were fabricated by electrodeposition. Moreover, PECVD was used to create an insulating layer between these components. In order to evaluate the system, a mechanical test fixture and an electronic measurement system were created.
AB - The standard linear Inductosyn® system consists of two measurement elements, a scale and a slider. The stationary scale contains a single meander winding, while the moving slider has two meander windings for sensing. Unlike the standard Inductosyn®, a second generation micro Inductosyn® system has four sensing windings, which enables to correct a wedge shaped air gap between scale and slide due to a misalignment occurring during the final assembly process. As its first generation micro Inductosyn® predecessor, it features magnetic flux guides not found in the standard Inductosyn® system to improve coupling. The micro displacement sensor was fabricated using Micro Electro-mechanical System (MEMS) technology. The sensor components, such as meander windings and flux guides, were fabricated by electrodeposition. Moreover, PECVD was used to create an insulating layer between these components. In order to evaluate the system, a mechanical test fixture and an electronic measurement system were created.
UR - http://www.scopus.com/inward/record.url?scp=84885757993&partnerID=8YFLogxK
U2 - 10.1149/05010.0175ecst
DO - 10.1149/05010.0175ecst
M3 - Conference contribution
AN - SCOPUS:84885757993
SN - 9781607683582
T3 - ECS Transactions
SP - 175
EP - 187
BT - Magnetic Materials, Processes, and Devices 12
PB - Electrochemical Society, Inc.
T2 - 12th International Symposium on Magnetic Materials, Processes and Devices - PRiME 2012
Y2 - 8 October 2012 through 10 October 2012
ER -