Fabrication and characterization of a Ni-Fe-W core microtransformer for high-Frequency power applications

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OriginalspracheEnglisch
Seiten (von - bis)42-47
Seitenumfang6
FachzeitschriftSensors and Actuators, A: Physical
Jahrgang267
Frühes Online-Datum28 Sept. 2017
PublikationsstatusVeröffentlicht - 1 Nov. 2017

Abstract

This paper presents the fabrication and characterization of a microtransformer device for high-frequency power applications using electroplating and photolithography techniques. These devices are realized on an oxidized silicon wafer. They have the identical geometry on the primary and the secondary side combined with a core thickness value of 6 μm. The device consists of six coils (three coils on the primary side and three coils on the secondary side) and each coil has nine numbers of turns. The copper coil winding and the Ni-Fe-W alloy magnetic core are fabricated by electroplating. The fabricated microtransformer has an inductance ranging from 25 nH to 74 nH. An optimum quality factor of 4.5 is obtained at 70 MHz.

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Fabrication and characterization of a Ni-Fe-W core microtransformer for high-Frequency power applications. / Mundotiya, Brij Mohan; Dinulovic, Dragan; Rissing, Lutz et al.
in: Sensors and Actuators, A: Physical, Jahrgang 267, 01.11.2017, S. 42-47.

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Mundotiya BM, Dinulovic D, Rissing L, Wurz MC. Fabrication and characterization of a Ni-Fe-W core microtransformer for high-Frequency power applications. Sensors and Actuators, A: Physical. 2017 Nov 1;267:42-47. Epub 2017 Sep 28. doi: 10.1016/j.sna.2017.09.032
Mundotiya, Brij Mohan ; Dinulovic, Dragan ; Rissing, Lutz et al. / Fabrication and characterization of a Ni-Fe-W core microtransformer for high-Frequency power applications. in: Sensors and Actuators, A: Physical. 2017 ; Jahrgang 267. S. 42-47.
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