Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique

Details

Originalsprache	Deutsch
Titel des Sammelwerks	Silicon materials science and technology
Untertitel	proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
Erscheinungsort	Pennington
Herausgeber (Verlag)	Electrochemical Society, Inc.
Publikationsstatus	Veröffentlicht - 1998
Veranstaltung	8th International Symposium on Silicon Materials Science and Technology - San Diego Dauer: 4 Mai 1998 → 8 Mai 1998 Konferenznummer: 8

Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique. / Lüdge, A.; Riemann, H.; Schröder, W. et al.
Silicon materials science and technology: proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. Pennington: Electrochemical Society, Inc., 1998.

Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung

Lüdge, A, Riemann, H, Schröder, W, Mühlbauer, A, Muiznieks, A & Raming, G 1998, Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique. in Silicon materials science and technology: proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. Electrochemical Society, Inc., Pennington, 8th International Symposium on Silicon Materials Science and Technology, San Diego, 4 Mai 1998.

Lüdge, A., Riemann, H., Schröder, W., Mühlbauer, A., Muiznieks, A., & Raming, G. (1998). Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique. In Silicon materials science and technology: proceedings of the Eighth International Symposium on Silicon Materials Science and Technology Electrochemical Society, Inc..

Lüdge A, Riemann H, Schröder W, Mühlbauer A, Muiznieks A, Raming G. Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique. in Silicon materials science and technology: proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. Pennington: Electrochemical Society, Inc. 1998

Lüdge, A. ; Riemann, H. ; Schröder, W. et al. / Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique. Silicon materials science and technology: proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. Pennington : Electrochemical Society, Inc., 1998.

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title = "Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique",

author = "A. L{\"u}dge and H. Riemann and W. Schr{\"o}der and Alfred M{\"u}hlbauer and Andris Muiznieks and Georg Raming",

year = "1998",

language = "Deutsch",

booktitle = "Silicon materials science and technology",

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note = "8th International Symposium on Silicon Materials Science and Technology ; Conference date: 04-05-1998 Through 08-05-1998",

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T1 - Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique

AU - Lüdge, A.

AU - Riemann, H.

AU - Schröder, W.

AU - Mühlbauer, Alfred

AU - Muiznieks, Andris

AU - Raming, Georg

N1 - Conference code: 8

PY - 1998

Y1 - 1998

M3 - Aufsatz in Konferenzband

BT - Silicon materials science and technology

PB - Electrochemical Society, Inc.

CY - Pennington

T2 - 8th International Symposium on Silicon Materials Science and Technology

Y2 - 4 May 1998 through 8 May 1998

ER -