Evaporation apparatus with gas supply

Publikation: Schutzrecht/Patent › Patent

Erfinder/-innen

  • Gerd Hoffmann (Erfinder*in)
  • Sven Schramm (Erfinder*in)
  • Roland Trassl (Erfinder*in)

Organisationseinheiten

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Details

OriginalspracheEnglisch
Veröffentlichungsnummer (amtliches Aktenzeichen)WO2014207088A1
IPCH01J 37/ 32 A I,C23C14/00,C23C14/08,C23C14/24,C23C14/56,C23C14/0021,C23C14/081,C23C14/24,C23C14/562,C23C16/448
Prioritätsdatum28 Juni 2013
Anmeldedatum26 Juni 2014
PublikationsstatusVeröffentlicht - 31 Dez. 2014

Abstract

An evaporation apparatus (100) for depositing material on a substrate (160) supported by a drum (170) is described. The evaporation apparatus includes a first set of evaporation crucibles (110) aligned in a first line (120) along a first direction (121) for depositing evaporated material on the substrate; a first gas supply pipe (130) extending in the first direction (121) and being arranged between at least one of the evaporation crucibles of the first set of evaporation crucibles (110) and the drum (170); and a second gas supply pipe (140) extending in the first direction (121) for providing a gas between the first set of evaporation crucibles (110) and the drum (170) with openings (150) shaped and positioned to improve the uniformity of the deposition of the material.

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Evaporation apparatus with gas supply. / Hoffmann, Gerd (Erfinder*in); Schramm, Sven (Erfinder*in); Trassl, Roland (Erfinder*in).
Patent Nr.: WO2014207088A1. Dez. 31, 2014.

Publikation: Schutzrecht/Patent › Patent

Hoffmann G, Schramm S, Trassl R, Erfinder/-innen. Evaporation apparatus with gas supply. WO2014207088A1. 2014 Dez 31.
Hoffmann, Gerd (Erfinder*in) ; Schramm, Sven (Erfinder*in) ; Trassl, Roland (Erfinder*in). / Evaporation apparatus with gas supply. Patent Nr.: WO2014207088A1. Dez. 31, 2014.
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title = "Evaporation apparatus with gas supply",
abstract = "An evaporation apparatus (100) for depositing material on a substrate (160) supported by a drum (170) is described. The evaporation apparatus includes a first set of evaporation crucibles (110) aligned in a first line (120) along a first direction (121) for depositing evaporated material on the substrate; a first gas supply pipe (130) extending in the first direction (121) and being arranged between at least one of the evaporation crucibles of the first set of evaporation crucibles (110) and the drum (170); and a second gas supply pipe (140) extending in the first direction (121) for providing a gas between the first set of evaporation crucibles (110) and the drum (170) with openings (150) shaped and positioned to improve the uniformity of the deposition of the material.",
author = "Gerd Hoffmann and Sven Schramm and Roland Trassl",
note = "Au{\ss}erdem ver{\"o}ffentlicht als: CN105378136A; CN105378136B; EP2818572A1; EP2818572B1; JP2016524047A; JP2016524047A; KR20160025600A; US10081866B2; US2015000598A1; WO2014207088A1; H01J 37/ 32 A I,C23C14/00,C23C14/08,C23C14/24,C23C14/56,C23C14/0021,C23C14/081,C23C14/24,C23C14/562,C23C16/448",
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TY - PAT

T1 - Evaporation apparatus with gas supply

AU - Hoffmann, Gerd

AU - Schramm, Sven

AU - Trassl, Roland

N1 - Außerdem veröffentlicht als: CN105378136A; CN105378136B; EP2818572A1; EP2818572B1; JP2016524047A; JP2016524047A; KR20160025600A; US10081866B2; US2015000598A1

PY - 2014/12/31

Y1 - 2014/12/31

N2 - An evaporation apparatus (100) for depositing material on a substrate (160) supported by a drum (170) is described. The evaporation apparatus includes a first set of evaporation crucibles (110) aligned in a first line (120) along a first direction (121) for depositing evaporated material on the substrate; a first gas supply pipe (130) extending in the first direction (121) and being arranged between at least one of the evaporation crucibles of the first set of evaporation crucibles (110) and the drum (170); and a second gas supply pipe (140) extending in the first direction (121) for providing a gas between the first set of evaporation crucibles (110) and the drum (170) with openings (150) shaped and positioned to improve the uniformity of the deposition of the material.

AB - An evaporation apparatus (100) for depositing material on a substrate (160) supported by a drum (170) is described. The evaporation apparatus includes a first set of evaporation crucibles (110) aligned in a first line (120) along a first direction (121) for depositing evaporated material on the substrate; a first gas supply pipe (130) extending in the first direction (121) and being arranged between at least one of the evaporation crucibles of the first set of evaporation crucibles (110) and the drum (170); and a second gas supply pipe (140) extending in the first direction (121) for providing a gas between the first set of evaporation crucibles (110) and the drum (170) with openings (150) shaped and positioned to improve the uniformity of the deposition of the material.

M3 - Patent

M1 - WO2014207088A1

Y2 - 2014/06/26

ER -