Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Magnetic Materials, Processes, and Devices 12 |
| Herausgeber (Verlag) | Electrochemical Society, Inc. |
| Seiten | 189-197 |
| Seitenumfang | 9 |
| Auflage | 10 |
| ISBN (Print) | 9781607683582 |
| Publikationsstatus | Veröffentlicht - 2013 |
| Veranstaltung | 12th International Symposium on Magnetic Materials, Processes and Devices - PRiME 2012 - Honolulu, HI, USA / Vereinigte Staaten Dauer: 8 Okt. 2012 → 10 Okt. 2012 |
Publikationsreihe
| Name | ECS Transactions |
|---|---|
| Nummer | 10 |
| Band | 50 |
| ISSN (Print) | 1938-5862 |
| ISSN (elektronisch) | 1938-6737 |
Abstract
Magnetic flux guides are often a part of MEMS. These flux guides are usually made by electroplating of soft magnetic materials like NiFe. The geometry of the flux guides influences the magnetic anisotropy. A new method for the fabrication of the flux guides is the embossing of the surface to influence the magnetic anisotropy. For this purpose the Institute for micro production technology (IMPT) at the Leibniz Universitaet Hannover designed and fabricated two tools for a molding press. The embossing tool for a molding press (silicon carbide) and a bond tool are applied. This contribution describes the fabrication of the embossing tools for the molding press and the embossing process of NiFe45/55 surfaces applying the fabricated tools and the wire bond tool. The embossed surfaces are characterized via a Kerr microscope.
ASJC Scopus Sachgebiete
- Ingenieurwesen (insg.)
- Allgemeiner Maschinenbau
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Magnetic Materials, Processes, and Devices 12. 10. Aufl. Electrochemical Society, Inc., 2013. S. 189-197 (ECS Transactions; Band 50, Nr. 10).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Embossing of soft-magnetic structures and influence on magnetic properties
AU - Kaiser, M.
AU - Wurz, M. C.
AU - Cvetkovi, S.
AU - Rissing, L.
PY - 2013
Y1 - 2013
N2 - Magnetic flux guides are often a part of MEMS. These flux guides are usually made by electroplating of soft magnetic materials like NiFe. The geometry of the flux guides influences the magnetic anisotropy. A new method for the fabrication of the flux guides is the embossing of the surface to influence the magnetic anisotropy. For this purpose the Institute for micro production technology (IMPT) at the Leibniz Universitaet Hannover designed and fabricated two tools for a molding press. The embossing tool for a molding press (silicon carbide) and a bond tool are applied. This contribution describes the fabrication of the embossing tools for the molding press and the embossing process of NiFe45/55 surfaces applying the fabricated tools and the wire bond tool. The embossed surfaces are characterized via a Kerr microscope.
AB - Magnetic flux guides are often a part of MEMS. These flux guides are usually made by electroplating of soft magnetic materials like NiFe. The geometry of the flux guides influences the magnetic anisotropy. A new method for the fabrication of the flux guides is the embossing of the surface to influence the magnetic anisotropy. For this purpose the Institute for micro production technology (IMPT) at the Leibniz Universitaet Hannover designed and fabricated two tools for a molding press. The embossing tool for a molding press (silicon carbide) and a bond tool are applied. This contribution describes the fabrication of the embossing tools for the molding press and the embossing process of NiFe45/55 surfaces applying the fabricated tools and the wire bond tool. The embossed surfaces are characterized via a Kerr microscope.
UR - http://www.scopus.com/inward/record.url?scp=84885709933&partnerID=8YFLogxK
U2 - 10.1149/05010.0189ecst
DO - 10.1149/05010.0189ecst
M3 - Conference contribution
AN - SCOPUS:84885709933
SN - 9781607683582
T3 - ECS Transactions
SP - 189
EP - 197
BT - Magnetic Materials, Processes, and Devices 12
PB - Electrochemical Society, Inc.
T2 - 12th International Symposium on Magnetic Materials, Processes and Devices - PRiME 2012
Y2 - 8 October 2012 through 10 October 2012
ER -