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Electron-selective atomic-layer-deposited TiOx layers: Impact of post-deposition annealing and implementation into n -type silicon solar cells

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

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  • Institut für Solarenergieforschung GmbH (ISFH)

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OriginalspracheEnglisch
Titel des SammelwerksSiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics
Herausgeber/-innenRolf Brendel, Jef Poortmans, Arthur Weeber, Giso Hahn, Christophe Ballif, Stefan Glunz, Pierre-Jean Ribeyron
Herausgeber (Verlag)American Institute of Physics Inc.
ISBN (Print)9780735417151
PublikationsstatusVeröffentlicht - 10 Aug. 2018
VeranstaltungSiliconPV 2018: The 8th International Conference on Crystalline Silicon Photovoltaics - Lausanne, Schweiz
Dauer: 19 März 201821 März 2018

Publikationsreihe

NameAIP Conference Proceedings
Band1999
ISSN (Print)0094-243X
ISSN (elektronisch)1551-7616

Abstract

Atomic-layer-deposited titanium oxide (TiOx) is examined for the application as electron-selective full-area contact to n-type silicon solar cells. Although the surface passivation quality of TiOx-passivated n-type silicon wafers is quite poor directly after deposition of the TiOx, we demonstrate that annealing in ambient environment at only 250°C reduces the surface recombination velocity to values below 10 cm/s over the entire cell-relevant injection range. By combining lifetime measurements with X-ray diffraction (XRD) characterization we demonstrate that the degradation of the passivation by TiOx during annealing at increased temperature is due to the crystallization of the amorphous TiOx into the crystalline anatase phase. We implement our optimized ALD-TiOx layers as electron-selective full-area rear contacts into n-type silicon solar cells and reach efficiencies up to 20.3% after low-temperature annealing in our first batch. The surface recombination velocity Srear at the cell rear, as extracted from the measured spectral internal quantum efficiency, is (52±20) cm/s. Interestingly, the fabricated solar cells show a much better thermal stability compared to the lifetime test structures, which seems to be a fundamental difference. The main difference of the finished solar cells to our lifetime test structures is that the TiOx layer is fully covered with aluminum in the solar cells. This suggests an interaction of Al with the ultrathin TiOx layer, resulting in an improved thermal stability.

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Electron-selective atomic-layer-deposited TiOx layers: Impact of post-deposition annealing and implementation into n -type silicon solar cells. / Titova, Valeriya; Startsev, Dimitrij; Schmidt, Jan.
SiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics. Hrsg. / Rolf Brendel; Jef Poortmans; Arthur Weeber; Giso Hahn; Christophe Ballif; Stefan Glunz; Pierre-Jean Ribeyron. American Institute of Physics Inc., 2018. 040022 (AIP Conference Proceedings; Band 1999).

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Titova, V, Startsev, D & Schmidt, J 2018, Electron-selective atomic-layer-deposited TiOx layers: Impact of post-deposition annealing and implementation into n -type silicon solar cells. in R Brendel, J Poortmans, A Weeber, G Hahn, C Ballif, S Glunz & P-J Ribeyron (Hrsg.), SiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics., 040022, AIP Conference Proceedings, Bd. 1999, American Institute of Physics Inc., SiliconPV 2018: The 8th International Conference on Crystalline Silicon Photovoltaics, Lausanne, Schweiz, 19 März 2018. https://doi.org/10.1063/1.5049285
Titova, V., Startsev, D., & Schmidt, J. (2018). Electron-selective atomic-layer-deposited TiOx layers: Impact of post-deposition annealing and implementation into n -type silicon solar cells. In R. Brendel, J. Poortmans, A. Weeber, G. Hahn, C. Ballif, S. Glunz, & P.-J. Ribeyron (Hrsg.), SiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics Artikel 040022 (AIP Conference Proceedings; Band 1999). American Institute of Physics Inc.. https://doi.org/10.1063/1.5049285
Titova V, Startsev D, Schmidt J. Electron-selective atomic-layer-deposited TiOx layers: Impact of post-deposition annealing and implementation into n -type silicon solar cells. in Brendel R, Poortmans J, Weeber A, Hahn G, Ballif C, Glunz S, Ribeyron PJ, Hrsg., SiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics. American Institute of Physics Inc. 2018. 040022. (AIP Conference Proceedings). doi: 10.1063/1.5049285
Titova, Valeriya ; Startsev, Dimitrij ; Schmidt, Jan. / Electron-selective atomic-layer-deposited TiOx layers : Impact of post-deposition annealing and implementation into n -type silicon solar cells. SiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics. Hrsg. / Rolf Brendel ; Jef Poortmans ; Arthur Weeber ; Giso Hahn ; Christophe Ballif ; Stefan Glunz ; Pierre-Jean Ribeyron. American Institute of Physics Inc., 2018. (AIP Conference Proceedings).
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abstract = "Atomic-layer-deposited titanium oxide (TiOx) is examined for the application as electron-selective full-area contact to n-type silicon solar cells. Although the surface passivation quality of TiOx-passivated n-type silicon wafers is quite poor directly after deposition of the TiOx, we demonstrate that annealing in ambient environment at only 250°C reduces the surface recombination velocity to values below 10 cm/s over the entire cell-relevant injection range. By combining lifetime measurements with X-ray diffraction (XRD) characterization we demonstrate that the degradation of the passivation by TiOx during annealing at increased temperature is due to the crystallization of the amorphous TiOx into the crystalline anatase phase. We implement our optimized ALD-TiOx layers as electron-selective full-area rear contacts into n-type silicon solar cells and reach efficiencies up to 20.3% after low-temperature annealing in our first batch. The surface recombination velocity Srear at the cell rear, as extracted from the measured spectral internal quantum efficiency, is (52±20) cm/s. Interestingly, the fabricated solar cells show a much better thermal stability compared to the lifetime test structures, which seems to be a fundamental difference. The main difference of the finished solar cells to our lifetime test structures is that the TiOx layer is fully covered with aluminum in the solar cells. This suggests an interaction of Al with the ultrathin TiOx layer, resulting in an improved thermal stability.",
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T2 - SiliconPV 2018: The 8th International Conference on Crystalline Silicon Photovoltaics

AU - Titova, Valeriya

AU - Startsev, Dimitrij

AU - Schmidt, Jan

N1 - Funding Information: This work was supported by the German Federal Environmental Foundation (DBU) and the German State of Lower Saxony. We acknowledge the funding of this project within the PhD Scholarship Programme of the DBU.

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AB - Atomic-layer-deposited titanium oxide (TiOx) is examined for the application as electron-selective full-area contact to n-type silicon solar cells. Although the surface passivation quality of TiOx-passivated n-type silicon wafers is quite poor directly after deposition of the TiOx, we demonstrate that annealing in ambient environment at only 250°C reduces the surface recombination velocity to values below 10 cm/s over the entire cell-relevant injection range. By combining lifetime measurements with X-ray diffraction (XRD) characterization we demonstrate that the degradation of the passivation by TiOx during annealing at increased temperature is due to the crystallization of the amorphous TiOx into the crystalline anatase phase. We implement our optimized ALD-TiOx layers as electron-selective full-area rear contacts into n-type silicon solar cells and reach efficiencies up to 20.3% after low-temperature annealing in our first batch. The surface recombination velocity Srear at the cell rear, as extracted from the measured spectral internal quantum efficiency, is (52±20) cm/s. Interestingly, the fabricated solar cells show a much better thermal stability compared to the lifetime test structures, which seems to be a fundamental difference. The main difference of the finished solar cells to our lifetime test structures is that the TiOx layer is fully covered with aluminum in the solar cells. This suggests an interaction of Al with the ultrathin TiOx layer, resulting in an improved thermal stability.

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A2 - Ribeyron, Pierre-Jean

PB - American Institute of Physics Inc.

Y2 - 19 March 2018 through 21 March 2018

ER -

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