Electromagnetic Ultra-Precision Linear Guide

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandBeitrag in Buch/SammelwerkForschungPeer-Review

Autoren

  • Rudolf Krüger
  • Benjamin Bergmann
  • Berend Denkena
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Details

OriginalspracheEnglisch
Titel des SammelwerksLecture Notes in Production Engineering
Herausgeber (Verlag)Springer Nature
Seiten75-106
Seitenumfang32
ISBN (elektronisch)978-3-030-83765-5
ISBN (Print)978-3-030-83764-8
PublikationsstatusVeröffentlicht - 2022

Publikationsreihe

NameLecture Notes in Production Engineering
BandPart F1161
ISSN (Print)2194-0525
ISSN (elektronisch)2194-0533

Abstract

While electromagnetic levitation systems are already available for ultra-precision applications, they are limited to inspection or measurement tasks and non-mechanical processing due to their severely limited stiffness. This contribution introduces a novel electromagnetic linear guide, which was specifically developed for use in ultra-precision high performance machining. The active guide system features a position noise and a mean positioning error in the low nanometer range. At the same time, it provides sufficient dynamic stiffness for diamond machining. Furthermore, the actuator and sensor capabilities of the electromagnetic linear guide are applied to increase motion dynamics while reducing dynamic disturbances in motion phases by up to 75 %. The capability of the new electromagnetic linear guide is finally shown for a reference diamond machining process.

ASJC Scopus Sachgebiete

Zitieren

Electromagnetic Ultra-Precision Linear Guide. / Krüger, Rudolf; Bergmann, Benjamin; Denkena, Berend.
Lecture Notes in Production Engineering. Springer Nature, 2022. S. 75-106 (Lecture Notes in Production Engineering; Band Part F1161).

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandBeitrag in Buch/SammelwerkForschungPeer-Review

Krüger, R, Bergmann, B & Denkena, B 2022, Electromagnetic Ultra-Precision Linear Guide. in Lecture Notes in Production Engineering. Lecture Notes in Production Engineering, Bd. Part F1161, Springer Nature, S. 75-106. https://doi.org/10.1007/978-3-030-83765-5_4
Krüger, R., Bergmann, B., & Denkena, B. (2022). Electromagnetic Ultra-Precision Linear Guide. In Lecture Notes in Production Engineering (S. 75-106). (Lecture Notes in Production Engineering; Band Part F1161). Springer Nature. https://doi.org/10.1007/978-3-030-83765-5_4
Krüger R, Bergmann B, Denkena B. Electromagnetic Ultra-Precision Linear Guide. in Lecture Notes in Production Engineering. Springer Nature. 2022. S. 75-106. (Lecture Notes in Production Engineering). Epub 2021 Aug 21. doi: 10.1007/978-3-030-83765-5_4
Krüger, Rudolf ; Bergmann, Benjamin ; Denkena, Berend. / Electromagnetic Ultra-Precision Linear Guide. Lecture Notes in Production Engineering. Springer Nature, 2022. S. 75-106 (Lecture Notes in Production Engineering).
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